MEMS (Micro Electromechanical System) switching device, array substrate, manufacturing method of array substrate and display device
A switching device and switching element technology, which can be applied to static indicators, nonlinear optics, instruments, etc., can solve the problem of no display device, etc., and achieve the effect of good display effect and low cost.
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[0051] In order to meet the display requirements of different scenarios, so that the display device can be flexibly switched in three display modes: transmission mode, reflection mode and transflective mode, embodiments of the present invention provide a MEMS switch device, an array substrate and a manufacturing method thereof , a method for driving a display device and a MEMS switch device. In order to make the purpose, technical solution and advantages of the present invention clearer, the following examples are given to further describe the present invention in detail.
[0052] like Figure 1 to Figure 4 As shown, the MEMS switch device 20 provided by the embodiment of the present invention ( Figure 1 to Figure 3 , only four MEMS switching devices are shown above the base substrate 10), including light valve elements 21 and switching elements 22, wherein:
[0053]The light valve element 21 includes: a first sensing electrode 211 perpendicular to the light transmission di...
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Abstract
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