Wet corrosion experiment platform
An experimental platform and wet etching technology, applied in the field of MEMS and its technology, can solve the problems of rough experiment requirements, low solution uniformity, few experimental devices, etc., and achieve the effect of high uniformity
Active Publication Date: 2016-09-07
SHANGHAI JIAOTONG UNIV
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Problems solved by technology
[0003] However, because the experimental environment is completed in an extreme acid-base solution, there are few matching experimental devices
[0004] A commonly used method in the market is to use a magnetic stirrer to indirectly make the acid-base solution flow through the magnetic force. Although this method can meet the relatively rough experimental requirements, the uniformity of the solution is relatively low.
It is difficult to meet the demand for experiments with high precision requirements
Method used
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[0035] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0036] Such as figure 1 , figure 2 , image 3 As shown, this embodiment provides a wet corrosion experiment platform, including: an integral frame part 1, a transmission mechanism 2, a propeller 3, a water hole entrance 4, a water hole body 5, a substrate placement part 6, a propeller fixing structure 7, Water tunnel entrance fixed structure 8, water tunnel body fixed structure 9; all parts materials are all made of polytetrafluoroethylene.
[0037] The transmission mechanism 2, the propeller ...
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The invention provides a wet etching experimental platform, which comprises a water tunnel part made of polytetrafluoroethylene, a substrate placing part and an overall framework part. The overall framework part is internally filled with an acid or alkaline solution. The water tunnel part and the substrate placing part are arranged in the overall framework part to be immersed in the acid or alkaline solution. The water tunnel part comprises a transmission mechanism, a propeller and a water-tunnel channel. The water-tunnel channel is decomposed into a water-tunnel inlet and a water-tunnel body. The transmission mechanism is driven to rotate by an external driving device. The transmission mechanism drives the propeller to rotate. During the rotation of the propeller, the acid or alkaline solution is blown to flow through the water-tunnel channel. The substrate placing part is placed inside the water-tunnel channel. A to-be-tested substrate is placed at the center of the substrate placing part. Under the blowing effect of the propeller, the acid or alkaline solution uniformly etches the substrate. According to the technical scheme of the invention, based on the wind tunnel principle, the acid or alkaline solution is enabled to flow uniformly on the substrate. Meanwhile, based on the water-tunnel structure, a plurality of substrate placement positions are provided. Therefore, the experimental platform can meet the requirements of experiments on different flowing properties.
Description
technical field [0001] The invention relates to the technical field of MEMS and its technology, in particular to a wet corrosion experiment platform capable of providing uniform acid-base solution flow. Background technique [0002] Wet etching is an important process in MEMS technology. In this process, most of the processing needs to have a uniform flow of acid-base solution to complete. The better the uniformity of the solution, the better the finish. [0003] However, because the experimental environment is completed in an extreme acid-base solution, there are few matching experimental devices. [0004] A commonly used method in the market is to use a magnetic stirrer to indirectly make the acid-base solution flow through the magnetic force. Although this method can meet the relatively rough experimental requirements, the uniformity of the solution is relatively low. It is difficult to meet the demand for experiments with high precision requirements. Contents of the...
Claims
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IPC IPC(8): G01N33/00
Inventor 张卫平楼星梁刘亚东唐健
Owner SHANGHAI JIAOTONG UNIV