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position sensor

A sensor and angular position technology, applied in the field of photoelectric position sensors, can solve the problem that the accuracy of position sensing is difficult to break through the micron level, and achieve the effect of improving the photoelectric response performance

Active Publication Date: 2018-06-05
宋金会
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Under the current technology, the accuracy of position sensing is also difficult to break through the micron level

Method used

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Embodiment Construction

[0030] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0031] The position sensor provided by the present invention includes an array of three-dimensional semiconductor nanocolumns, a flat transparent film electrode and a flat conductive substrate, the top end surface of the semiconductor nanocolumn is connected to one side surface of the transparent film electrode, and the bottom end surface It is connected to one side surface of the conductive substrate, and the transparent film electrode and the conductive substrate are parallel to each other; the conductive substrate and the transparent film electrode are electrically connected through an independent loop, and the independent loop includes a voltage and current detection unit , the independent loop is used to measure the r...

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Abstract

The invention discloses a position sensor which comprises an array three-dimensional semiconductor nano-pillar, a flat-plate-shaped transparent film electrode and a flat-plate-shaped conductive substrate. The end face of the top of the semiconductor nano-pillar is connected with the surface of one side of the transparent film electrode. The end face of the bottom is connected with the surface of one side of the conductive substrate. The transparent film electrode and the conductive substrate are parallel to each other. The conductive substrate is electrically connected with the transparent film electrode through an independent circuit. The independent circuit comprises a voltage and current detection unit. The independent circuit is used for measuring resistance change in the independent circuit. According to the sensor, the two-dimensional structure of a conventional semiconductor film material is changed into a three-dimensional nano-structure; the photoelectric effect of a device is significantly enhanced; the angle end of the sensor is connected with the independent circuit; constant voltage and a detection circuit are added; a detection resistor changes with the position of a light spot; and the distance from the light spot to the angle of the sensor can be measured through a current signal.

Description

technical field [0001] The invention relates to the technical field of photoelectric position sensors, in particular to an ultra-high-precision nano-array position sensor. Background technique [0002] High-precision photoelectric position sensors have very important applications in modern industry, military affairs, and daily life, and are indispensable positioning sensing devices in intelligent systems. For a high-precision intelligent system, its precision depends on the feedback accuracy of the sensor and the mechanical control accuracy. [0003] The currently widely used position sensor (Position Sensitive Device, PSD) is an electronic component based on a semiconductor thin film. Its working principle is to use the lateral photoelectric effect to generate photo-generated electrons on the semiconductor thin film irradiated by the light spot. The difference in electron concentration causes the photo-generated electrons to flow to the two electrodes. The flow between the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/26
Inventor 宋金会
Owner 宋金会