Magnetic field sensor with helical reset coil
A magnetic field sensor and magnetic field technology, used in instruments, measuring devices, measuring magnetic variables, etc., can solve the problems of low area utilization, large current, small magnetic field, etc., and achieve the effect of high area utilization
Active Publication Date: 2018-02-27
MEMSIC SEMICON WUXI
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[0007] The reset coil 120 is located in the same metal layer. In order to generate the magnetic field required to reset / reset each magnetic field sensing unit, it needs a larger current or needs to occupy a larger area, and its area utilization rate is low. , the magnetic field is small at the same current
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[0023] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0024] Reference herein to "one embodiment" or "an embodiment" refers to a particular feature, structure or characteristic that can be included in at least one implementation of the present invention. "In one embodiment" appearing in different places in this specification does not all refer to the same embodiment, nor is it a separate or selective embodiment that is mutually exclusive with other embodiments. Unless otherwise specified, the words connected, connected, and connected in this article that indicate electrical connection all indicate direct or indirect electrical connection, and indirect electrical connection refers to electrical connection via another device or circuit.
[0025] Figure 3a It is a schematic diagram of...
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The present invention provides a magnetic field sensor, which includes: at least one magnetic field sensing unit, which has a magnetic easy axis and a magnetic sensitive axis perpendicular to the magnetic easy axis; at least one helical reset coil, which spirally surrounds a corresponding magnetic field The sensing unit includes a first wire portion located above the corresponding magnetic field sensing unit, a second wire portion located below the corresponding magnetic field sensing unit, and a connection connecting the first wire portion and the second wire portion passing through the corresponding The third wire portion of the plane where the magnetic field sensing unit is located. In the present invention, a helical reset coil spirally encircling the corresponding magnetic field sensing unit is provided, which can have high area utilization and can generate a stronger reset / re-reset magnetic field under the condition of the same current.
Description
【Technical field】 [0001] The present invention relates to a magnetic field sensor, in particular to a magnetic field sensor with a helical reset coil. 【Background technique】 [0002] At present, magnetic field sensors based on the magnetoresistance effect have been widely used, such as anisotropic magnetoresistance (AMR) magnetic field sensors, giant magnetoresistance (GMR) magnetic field sensors and tunneling magnetoresistance (TMR) magnetic field sensors. Generally speaking, when the magnetic field sensor based on the magnetoresistive effect changes in the direction and magnitude of the magnetic field, the resistance of the device will change accordingly. The structure of the magnetic field sensor usually includes a layer of soft magnetic material, such as iron, cobalt, nickel, cobalt-iron-boron alloy or nickel-iron alloy (permalloy). When the direction and magnitude of the magnetic field change, the magnetization direction of the soft magnetic material layer changes acco...
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IPC IPC(8): G01R33/09
Inventor 蒋乐跃赵阳
Owner MEMSIC SEMICON WUXI