Solidification apparatus and solidification method
A technology of curing device and curing method, which is applied to the device for coating liquid on the surface, the arrangement of drying gas, lighting and heating equipment, etc., which can solve the problems of poor quality and difficult discharge of organic gas, so as to reduce the production cost of products and reduce condensation For the probability of particles, the effect of reducing the process time
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[0035] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0036] The embodiment of the present invention provides a curing device, which includes:
[0037] The chamber is used to hold the substrate coated with polyimide PI glue;
[0038] an air extraction device for evacuating the chamber;
[0039] The heating device is used for first heating the substrate to remove the organic gas in the PI glue when the chamber reaches a first preset pressure during the vacuuming process, and in the first After heating, a second heating is performed on the substrate to cure the PI glue.
[0040] The curing device provided by the embodiment of the present invention, by carrying out the process of removing organic gas in PI glue under the cond...
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