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Optical plastic substrate coating device

A technology of coating device and optical plastics, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating and other directions, can solve the problems of easy foaming and peeling, poor film firmness, etc., and achieves high production efficiency and good The effect of firmness and low energy consumption

Active Publication Date: 2016-02-03
苏州京浜光电科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide an optical plastic substrate coating device to solve the problems of poor film firmness and easy foaming and peeling after evaporation of plastic substrates

Method used

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  • Optical plastic substrate coating device
  • Optical plastic substrate coating device

Examples

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Embodiment Construction

[0013] The present invention will be further described below in conjunction with the examples, but not as a limitation of the present invention.

[0014] See figure 1 , the inclined optical plastic substrate coating device of the present embodiment includes a coating umbrella placed in a vacuum furnace, an evaporation source and a conductive rod, the coating umbrella is provided with side plates and umbrella surfaces, and the substrate to be coated is placed on the side plates. The included angle between the side plate and the horizontal is 70-85°, and the evaporation source is arranged at the lower part of the coating umbrella. The conductive rod is an oxygen-free copper rod with a diameter of 10 cm and a length of 1.0 m. The conductive rod is divided into left and right two and fixedly arranged between the plastic substrate and the evaporation source. The angle between the conductive rod and the surface of the plastic substrate is 0-5°, and the distance between the conduct...

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Abstract

The invention discloses an optical plastic substrate coating device. The optical plastic substrate coating device comprises a coating umbrella, an evaporation source and conductive bars, wherein the coating umbrella, the evaporation source and the conductive bars are arranged in a vacuum furnace; the coating umbrella is provided with side plates and an umbrella surface which are used for placing to-be-coated substrates; the evaporation source is arranged in the coating umbrella; the conductive bars are arranged between the substrates and the evaporation source; and the included angles between the conductive bars and the surfaces of the substrates are 0-5 degrees, the distances from the conductive bars to the substrates are 20cm-4cm, and the conductive bars are connected with a 1.2kV-1.5kV power supply. According to the optical plastic substrate coating device, the good firmness of the plastic substrate can be achieved without an IAD process.

Description

technical field [0001] The invention relates to a film coating device, in particular to a film coating device for evaporating an optical plastic substrate. Background technique [0002] Optical plastics refer to plastics used as optical media materials. It is mainly used in optical instruments to manufacture optical substrates, lenses, contact lenses, organic optical fibers, etc. The optical plastics that have been applied mainly include PMMA, PET, PC, PS and so on. In the future, plastic substrates can replace glass substrates as next-generation display materials, because plastic substrates have the advantages of being lighter, thinner, impact-resistant, and rollable than glass substrates, and can be applied to many portable and wearable display devices to increase their service life. And increase the scope of use. At present, plastic substrate coating is used as a transparent material with excellent performance in the optoelectronic industry and can be applied to touch ...

Claims

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Application Information

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IPC IPC(8): C23C14/24
Inventor 龚裕范辛
Owner 苏州京浜光电科技股份有限公司
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