Two-dimensional nanometer servo platform

A servo platform, two-dimensional nanotechnology, applied in the direction of the workbench, large fixed members, metal processing machinery parts, etc., can solve the problems of small rigidity, decoupling parts under pressure at the same time, decoupling parts can not bear too large, etc., to achieve High efficiency and good dynamic stability

Active Publication Date: 2016-02-24
TSINGHUA UNIV
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  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

[0002] The decoupling part of the existing two-dimensional nano servo platform is flexible, and the stiffness in one direction is relatively small, so the decoupling part cannot bear excessive pressure
However, during the motion of the existing two-dimensional nano-servo platform, it is inevitable that the decoupling parts in one direction will be compressed at the same time, which greatly limits the development of large-stroke motion of the terminal platform.

Method used

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Embodiment Construction

[0022] Embodiments of the invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0023] A two-dimensional nano servo platform 10 according to an embodiment of the present invention will be described below with reference to the accompanying drawings. Such as Figure 1-Figure 5 As shown, the two-dimensional nano-servo platform 10 according to the embodiment of the present invention includes a base 101, a terminal platform 102, an X-direction driver (not shown in the figure), a Y-direction driver (not shown in the figure), a first X-direction Rigid connector 1031, first Y-direction rigid connector 1032, second X-direction rigid connector 1033, second Y-direction rigid connector 1034, first Y-direction flexible decoupling member 1041, first X-di...

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Abstract

The invention discloses a two-dimensional nanometer servo platform. The two-dimensional nanometer servo platform comprises a base, a terminal platform, an X-direction driver, a Y-direction driver, a first X-direction rigid connecting piece, a first Y-direction rigid connecting piece, a first Y-direction flexible decoupling piece, a first X-direction flexible decoupling piece, a second X-direction rigid connecting piece, a second Y-direction rigid connecting piece, a second Y-direction flexible decoupling piece, a second X-direction flexible decoupling piece, a first X-direction flexible guiding piece, a second X-direction flexible guiding piece, a first Y-direction flexible guiding piece and a second Y-direction flexible guiding piece. The first X-direction rigid connecting piece extends in the X direction and is connected with the X-direction driver. The first Y-direction rigid connecting piece extends in the Y direction and is connected with the Y-direction driver. The second X-direction rigid connecting piece extends in the X direction and is connected with the first X-direction rigid connecting piece. The second Y-direction rigid connecting piece extends in the Y direction and is connected with the first Y-direction rigid connecting piece. According to the embodiment, the two-dimensional nanometer servo platform has the beneficial effects of being high in efficiency, good in dynamic stability and the like.

Description

technical field [0001] The invention relates to an efficient and stable two-dimensional nano servo platform. Background technique [0002] The decoupling part of the existing two-dimensional nanometer servo platform is flexible, and the stiffness in one direction is relatively small, so the decoupling part cannot bear excessive pressure. However, during the motion of the existing two-dimensional nano-servo platform, it is inevitable that the decoupling parts in one direction will be compressed at the same time, which greatly limits the development of large-stroke motion of the terminal platform. Contents of the invention [0003] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. Therefore, the present invention proposes a two-dimensional nano-servo platform with the advantages of good dynamic stability and high use efficiency. [0004] The two-dimensional nano-servo platform according to the embodiment of t...

Claims

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Application Information

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IPC IPC(8): B25H1/02B23Q1/25B23Q5/28
CPCB23Q1/25B23Q5/28B25H1/02
Inventor 张震汪昌明闫鹏
Owner TSINGHUA UNIV
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