Two-dimensional nanometer servo platform

Abstract

The invention discloses a two-dimensional nanometer servo platform. The two-dimensional nanometer servo platform comprises a base, a terminal platform, an X-direction driver, a Y-direction driver, a first X-direction rigid connecting piece, a first Y-direction rigid connecting piece, a first Y-direction flexible decoupling piece, a first X-direction flexible decoupling piece, a second X-direction rigid connecting piece, a second Y-direction rigid connecting piece, a second Y-direction flexible decoupling piece, a second X-direction flexible decoupling piece, a first X-direction flexible guiding piece, a second X-direction flexible guiding piece, a first Y-direction flexible guiding piece and a second Y-direction flexible guiding piece. The first X-direction rigid connecting piece extends in the X direction and is connected with the X-direction driver. The first Y-direction rigid connecting piece extends in the Y direction and is connected with the Y-direction driver. The second X-direction rigid connecting piece extends in the X direction and is connected with the first X-direction rigid connecting piece. The second Y-direction rigid connecting piece extends in the Y direction and is connected with the first Y-direction rigid connecting piece. According to the embodiment, the two-dimensional nanometer servo platform has the beneficial effects of being high in efficiency, good in dynamic stability and the like.

Description

technical field [0001] The invention relates to an efficient and stable two-dimensional nano servo platform. Background technique [0002] The decoupling part of the existing two-dimensional nanometer servo platform is flexible, and the stiffness in one direction is relatively small, so the decoupling part cannot bear excessive pressure. However, during the motion of the existing two-dimensional nano-servo platform, it is inevitable that the decoupling parts in one direction will be compressed at the same time, which greatly limits the development of large-stroke motion of the terminal platform. Contents of the invention [0003] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. Therefore, the present invention proposes a two-dimensional nano-servo platform with the advantages of good dynamic stability and high use efficiency. [0004] The two-dimensional nano-servo platform according to the embodiment of t...

AI Technical Summary

Problems solved by technology

[0002] The decoupling part of the existing two-dimensional nano servo platform is flexible, and the stiffness in one direction is relatively small, so the decoupling part cannot bear excessive pressure

However, during the motion of the existing two-dimensional nano-servo platform, it is inevitable that the decoupling parts in one direction will be compressed at the same time, which greatly limits the development of large-stroke motion of the terminal platform.

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