Flexible driving body and fast control mirror using the flexible driving body

Abstract

The invention provides a flexible exciter and a fast steering mirror using the flexible exciter, and the fast steering mirror comprises a base, a piezoelectric actuator, a flexible exciter, two fixed plates, a reflector and a drive control system; the reflector is arranged on a reflector bearing transverse plate of the flexible exciter; the piezoelectric actuator is embedded in an octagonal frame structure of the flexible exciter; the side face of the upper part of each fixed plate is fixedly connected with a rotary center pole of the flexible exciter, the lower end face of each fixed plate is fixedly connected with the base; the flexible exciter is fixedly connected with the base through a trigonal amplifying second input end plate of the flexible exciter; the surface, closed to the rotary center pole, of one end of each of two flexible plate springs of the flexible exciter, is pasted with an SGS strain gage, the drive control system is electrically connected with the piezoelectric actuator and an output end of the strain gage, and is used for realizing closed-loop control on angle of deflection of the reflector.

Description

technical field [0001] The invention belongs to the technical field of light beam control, and in particular relates to a flexible driving body and a fast control reflector using the flexible driving body. Background technique [0002] The fast control mirror is a precision optical instrument that controls the propagation direction of the light beam. It is a kind of key component in the modern opto-mechanical system. Frequency angle pointing, scanning and stabilization, with the advantages of small size, fast speed and high precision, have been widely used in space laser communication, adaptive optics, vehicle / airborne / satellite laser systems, image stabilization, compound axis precision tracking , astronomical telescope, laser imaging radar, laser beam stabilization system, confocal microscope real-time laser scanning, capture target tracking and other fields. [0003] The existing fast control mirrors mainly have two driving modes: voice coil motor and piezoelectric ceram...

AI Technical Summary

Problems solved by technology

When a single piezoelectric driver is used, the fast control mirror frame often adopts a lever structure, which is easy to cause structural asymmetry, cannot make full use of space, and will increase the size of the system. The asymmetric structure will also cause small positioning errors due to temperature changes.

When two piezoelectric drivers are used, the two drivers do push-pull motions in opposite directions under the action of opposite driving voltages to realize the rotation of the mirror body. This kind of fast control mirror is generally relatively large in size. Difficult to apply in space detection systems and weapon systems that have strict requirements on system size and weight

At the same time, structural limitations make it very difficult to ensure large-angle deflection and high-precision angle control at the same time

The two piezoelectric drivers will also cause inconsistency in the output of the same input voltage due to their own materials, which increases the difficulty of control

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