Circularly polarized beam splitter and manufacturing method thereof
A circularly polarized light and beam splitter technology, applied in the optical field, can solve the problems of small splitting ratio, complex structure, low efficiency, etc., and achieve the effect of easy integration and preparation, and simple structure
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Embodiment 1
[0048] Such as Figure 1 to Figure 3 As shown, a circularly polarized beam splitter provided by an embodiment of the present invention includes a substrate 10 and a spiral wire grid. Array distribution, wherein, the substrate 20 is provided with a conductive film 50, multiple groups of spiral wire grids are connected to the substrate 20 through the conductive film 50, each group of spiral wire grids includes 8 single spiral wire grids 20, and 8 single spiral wire grids 20 rotate have the same direction and are located on the same straight line, such as figure 2 As shown, and the initial rotation angles of eight single helical wire grids 20 increase sequentially by 22.5 degrees, the initial rotation angle of the first single helical wire grid in each group of helical wire grids is 0 degrees, and in each group of helical wire grids The initial rotation angle 30 of the first single helical wire grid 20 is 0 degrees, that is to say, the latter single helical wire grid 20 is rota...
Embodiment 2
[0050] This embodiment is similar to Embodiment 1, and the same parts will not be repeated. The difference between the two is that the diameter of the single helical wire grid 20 in this embodiment is 30 nm, and the distance between any two single helical wire grids 20 is 190 nm. . Such as Figure 7 with Figure 8 As shown, the wavelength range of circularly polarized light that can be transmitted by the circularly polarized beam splitter of this embodiment is 0.6-0.86 μm, the average transmittance of circularly polarized light is 77%, the splitting ratio is 1:0.029, and the splitting angle is 40 It is 24.7 degrees.
Embodiment 3
[0052] This embodiment is similar to Embodiment 1, and the same parts will not be repeated. The difference between the two is that in this embodiment, the diameter of the single spiral wire grid 20 is 30nm, and the distance between any two single spiral wire grids 20 250nm, such as Figure 9 with Figure 10 As shown, the wavelength range of circularly polarized light that can be transmitted by the circularly polarized beam splitter of this embodiment is 0.6-0.86 μm, the average transmittance of circularly polarized light is 86%, the splitting ratio is 1:0.029, and the splitting angle is 40 It is 19.3 degrees.
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