Layered transparent conductive oxide thin films

Abstract

Transparent conductive oxide thin films having a plurality of layers with voids located at each interface. Smooth TCO surfaces with no post growth processing and a largely tunable haze value. Methods of making include applying multiple layers of a conductive oxide onto a surface of a substrate, and interrupting the application between the multiple layers to form a plurality of voids at the interfaces.

Description

[0001] Cross References to Related Applications [0002] This application claims priority under 35 U.S.C. §119 to U.S. Provisional Application Serial No. 61 / 774874, filed March 8, 2013, upon which this application relies and which is incorporated by reference in its entirety Incorporated into this article. technical field [0003] The present disclosure relates to transparent conductive oxide (TCO) films, and more particularly, to layered TCO films that can be used in, for example, photovoltaic devices. Background technique [0004] The current state of the art for enhancing haze in Si tandem systems is based on surface engineering methods to texture either the TCO surface and / or the glass surface prior to TCO deposition. By forming large faceted surface features on the TCO, incident light will be geometrically scattered into the underlying semiconductor. This leads to increased light trapping, which overcomes the poor absorption coefficient in Si. Since TCO growth is con...

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These paths add additional process complexity in addition to cost in the case of polishing

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