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Surface form error measurement method for shallow aspheric surface

A technology of surface error and measurement method, which is applied to measurement devices, instruments, optical devices, etc., can solve the problems of large error and high cost, and achieve the effect of small error, low cost and small return error.

Inactive Publication Date: 2016-03-30
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0008] In view of this, the purpose of the present invention is to provide a method for measuring the surface error of a shallow aspheric surface, so as to solve the problems of large errors and high costs in previous measurement methods.

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  • Surface form error measurement method for shallow aspheric surface
  • Surface form error measurement method for shallow aspheric surface
  • Surface form error measurement method for shallow aspheric surface

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Embodiment Construction

[0037] The present invention will be further explained with a specific embodiment below, but it is not intended to limit the protection scope of the present invention.

[0038] In order to solve the problems of large errors and high costs in the measurement of aspheric surfaces in the past, this embodiment provides a surface error measurement method for shallow aspheric surfaces.

[0039] see figure 1 The measurement system used in the surface shape error measurement method for shallow aspheric surfaces is composed of an interferometer 1, a standard transmission spherical mirror 2, a measured aspheric surface 3, an adjustment mechanism 4, a computer 5 and a mirror positioner 6. The measured aspheric surface 3 is installed on the adjusting mechanism 4, and the adjusting mechanism 4 is used to adjust the inclination, eccentricity and defocus of the measured aspheric surface 3. The mirror locator 6 is used to detect the distance between the reference surface of the standard tran...

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Abstract

The invention provides a surface form error measurement method for a shallow aspheric surface, comprising steps of superposing the optimal comparison ball sphere center of a detected aspheric surface with a focus on a reference surface of an interferometer standard spherical mirror, and directly performing measurement of the shallow aspheric surface, wherein, at the position, the interference fringes formed by the aspheric surface and the reference surface are mostly sparse , the return stroke error is relatively small, and thus the shallow aspheric surface detection can be directly performed. The surface form error measurement method is simple in measurement, small in error and low in cost.

Description

technical field [0001] The invention relates to the field of optical element measurement, and in particular provides a method for measuring surface error of a shallow aspheric surface. Background technique [0002] At present, aspheric optical parts have been widely used in optical systems, and aspheric optical parts pose challenges to modern optical processing and inspection technologies. Because the accuracy and efficiency of optical manufacturing largely depend on inspection technology, high-precision in-situ inspection is of great significance for the manufacture of aspheric surfaces, especially large aspheric mirrors. [0003] Interferometry is currently the mainstream method for detecting surface error of aspheric surfaces. Compared with spherical surface detection, the technical difficulty of aspheric surface interference detection mainly lies in the difficulty in obtaining an ideal wavefront template. [0004] Interferometric detection of aspheric surfaces can be d...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 刘钰苗亮张文龙马冬梅金春水
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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