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A lens holding device

A clamping device and lens technology, applied in the directions of optics, instruments, camera bodies, etc., can solve the problem that the lens clamping mechanism cannot be adjusted in direction, and achieve the effect of improving efficiency and reducing debugging work.

Active Publication Date: 2018-07-03
CETC BEIJING ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the technical problem that the lens clamping mechanism of the detection chip cannot be adjusted in the prior art, the present invention provides a lens clamping device

Method used

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Embodiment Construction

[0063] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0064] refer to Figure 1 to Figure 6 As shown, the present invention provides a lens clamping device, comprising: a base 9; a first sliding seat 6, which is slidably arranged on the base 9 along a first horizontal direction; a first driving mechanism, driven by the first sliding seat 6 Connected, the first driving mechanism drives the first sliding seat 6 to move along the first direction; the second sliding seat 12 is slidably arranged on the first sliding seat 6 along the second horizontal direction; the second driving mechanism and the second sliding seat 12 drive connection, the second driving mechanism drives the second sliding seat 12 to move along the second direction; the vertical spring seat 20 is erected and fixed on the second sliding se...

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Abstract

The invention provides a lens clamping device, comprising: a base; a first sliding seat; a first driving mechanism, which is drivingly connected with the first sliding seat, and the first driving mechanism drives the first sliding seat to move along a first direction; The sliding seat is slidably arranged on the first sliding seat along the second horizontal direction; the second driving mechanism is drivingly connected with the second sliding seat, and the second driving mechanism drives the second sliding seat to move along the second direction; the vertical spring seat , is erected and fixed on the second sliding seat; the third sliding seat is slid on the vertical spring seat along the vertical direction; the third driving mechanism is drivingly connected with the third sliding seat, and the third driving mechanism drives the third sliding seat Move in the vertical direction; the clamping mechanism is installed on the third sliding seat and is used for clamping the lens. The lens clamping device of the present invention can adjust the clamped lens along three directions, so that the device can meet the back inspection of chips of different sizes. In addition, the device reduces the debugging work of the operator and greatly improves the detection efficiency.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a lens clamping device. Background technique [0002] In the field of semiconductor manufacturing such as chips, many equipment manufacturers have high requirements for the upper surface of the chip. Through image recognition on the upper surface of the chip, the quality of the chip can be distinguished. However, in the prior art, this method has the following disadvantages: [0003] 1) After the current process is completed, it is impossible to detect whether the back of the chip is damaged. This will affect the subsequent processing and use of the chip. [0004] 2) During the production process, the chip types and sizes are different, and the positions in the X, Y, and Z directions need to be adjusted frequently. The traditional lens clamping mechanism is only aligned to the center through mechanical assembly, and the position is fixed. During the detection proces...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16M11/04F16M11/18G03B17/56
CPCG03B17/561F16M11/043F16M11/18F16M2200/08
Inventor 刘亚奇郝靖李鹏飞
Owner CETC BEIJING ELECTRONICS EQUIP