Vibrating gyroscope based on one-piece cylindrical shell quartz resonator and piezoelectric film
A cylindrical shell, piezoelectric film technology, applied in the direction of gyro effect for speed measurement, gyroscope/steering sensing equipment, measurement device, etc. and other problems, to achieve the effect of low power consumption, low processing cost, and reduction of anisotropy
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[0033] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0034] The resonator of the vibrating gyroscope with a cylindrical shell in this embodiment is made of high-purity fused silica material, and the internal loss of the material is extremely small and has excellent isotropy, so that the high quality factor and physical symmetry of the resonator can be guaranteed. Therefore, the characteristics of high sensitivity, high signal-to-noise ratio, low drift error and low power consumption of the cylindrical shell vibrating gyroscope are guaranteed. Such as figure 2 , image 3 As shown, the cylindrical shell gyroscope of this embodiment includes a resonant ring 1, a vibration guide ring 2, a fixed column 3, a chassis 4, and a piezoelectric thin film electrode 6, and the chassis 4 is provided with 8 chassis holes 5.
[0035] The resonance ring 1 and the vibration guide ring 2 are both cylindrical s...
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