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Temperature sensor, sensing apparatus and manufacturing method

A technology of temperature sensor and manufacturing method, applied in the direction of thermometer, measuring device, adopting electrical device, etc., capable of solving problems such as changing bridge voltage

Active Publication Date: 2016-05-11
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Bending of the diaphragm leads to an opposite resistance change of the adjacent resistors and thus to a changing bridge voltage

Method used

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  • Temperature sensor, sensing apparatus and manufacturing method
  • Temperature sensor, sensing apparatus and manufacturing method
  • Temperature sensor, sensing apparatus and manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0039] figure 1 A block diagram of an embodiment of a temperature sensor 1 according to the invention is shown.

[0040] The temperature sensor 1 has a positive supply connection 2 and a negative supply connection 3 , between which two diodes 4 - 1 , 4 - 3 are arranged in series. The other diodes 4-1-4-4 are each indicated by three points. here, figure 1 The three points in do not show electrical interruption of the series circuit. If no further diodes 4 - 1 - 4 - 4 are provided, diode 4 - 1 is coupled directly to positive supply connection 2 , and diode 4 - 3 is coupled directly to negative supply connection 3 .

[0041] A measuring connection 5 is arranged between the first diode 4 - 1 and the second diode 4 - 2 , which is coupled to a controllable current source 6 . Just for clarification, in figure 1 In the current source 6 there are arranged two symbols for current sources 20 , 21 which can be alternately coupled to the measuring connection 5 via a switch 23 . Here,...

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PUM

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Abstract

The invention provides a temperature sensor, a sensing apparatus and a manufacturing method. The temperature sensor is provided with a positive power supply connection terminal and a negative power supply connection terminal, at least two diodes electronically connected in series in an on-state direction arranged between the positive power supply connection terminal and the negative power supply connection terminal, a measuring connection terminal arranged between the at least two diodes, a controllable current source which is coupled to the measuring connection terminal and is configured to apply positive and negative current to the measuring connection terminal, and an analyzing processing apparatus which is configured to detect the voltage on the measuring connection terminal applied by the positive current of the current source and the negative current of the current source and compute a temperature of the detected voltage. In addition, the invention discloses a sensing apparatus and a manufacturing method.

Description

technical field [0001] The invention relates to a temperature sensor, a sensor device and a production method for a temperature sensor. Background technique [0002] A variety of microelectromechanical sensors, so-called MEMS sensors, exist today. MEMS sensors can be used, for example, to detect acceleration, pressure, and the like. [0003] Pressure sensors are used, for example, in consumer devices - such as mobile phones, household appliances, gas alarms, etc. [0004] In MEMS-based pressure sensors, a measuring bridge consisting of electrical resistances is usually applied to a diaphragm that can deform elastically under pressure. [0005] DE 10231727 A1 shows such a pressure sensor as an example. [0006] The resistance measuring bridge usually consists of four transverse and longitudinal pressure-sensitive piezoresistive elements arranged alternately around the circumference. The deflection of the membrane leads to an opposite resistance change of adjacent resistor...

Claims

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Application Information

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IPC IPC(8): G01K7/01
CPCG01K7/01
Inventor R·菲克斯C·V·J·切比亚托夫斯基
Owner ROBERT BOSCH GMBH