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Measurement area compensation method when inspecting substrates

A compensation method and area technology, applied in the direction of measuring devices, image enhancement, instruments, etc., can solve the problem of increased failure rate and achieve the effect of improving reliability

Active Publication Date: 2019-10-01
GAOYING TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] As described above, as a plurality of panels are made into one substrate, the flexible circuit substrate needs to print a complicated circuit of a small-area panel, and therefore, the defect rate increases due to an increase in the degree of integration.

Method used

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  • Measurement area compensation method when inspecting substrates
  • Measurement area compensation method when inspecting substrates
  • Measurement area compensation method when inspecting substrates

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Embodiment Construction

[0056] Just refer to the attached Figure 1 With multiple embodiments described in detail, it is possible to clearly understand the purpose, effect and technical structure for realizing the present invention. In describing the present invention, when it is judged that a specific description of a known function or structure will unnecessarily obscure the gist of the present invention, the detailed description will be omitted. In addition, a plurality of terms described later are terms defined in the present invention in consideration of structure, action, function, and the like, and may vary depending on the user's or operator's intention or custom.

[0057] However, the present invention is not limited to the plurality of embodiments disclosed below, but can be embodied in various forms different from each other. However, this embodiment is only provided to make the disclosure of the present invention more complete and to enable those of ordinary skill in the art to fully und...

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Abstract

The invention relates to a measurement area compensation method when inspecting a substrate. The above method includes: a step of judging the validity of the first measurement area on the substrate; in the case that the first measurement area (FOV) is not valid, pre-set the first measurement area (FOV) as the center The step of determining a plurality of effective measurement areas (FOV) in a plurality of adjacent measurement areas within the radius; extracting the above-mentioned preset radius centered on the first measurement area in the plurality of effective measurement areas (FOV) a step of a plurality of feature objects within; and a step of generating a compensation matrix for the first measurement region by using the information of the extracted plurality of feature objects. According to the above method, even when the compensation matrix generated using the information of the characteristic object in the first measurement region is not valid, the reliability of the inspection result when inspecting the substrate can be improved.

Description

technical field [0001] The present invention relates to a method of compensating a measurement region when inspecting a substrate, and more specifically, relates to a method for compensating a compensation matrix that is adjacent to the current measurement region when the validity of a compensation matrix generated from information in the current measurement region cannot be relied A method of generating a compensation matrix for the current measurement region based on the information in the measurement region. Furthermore, it relates to a method of subdividing a measurement region of a flexible printed circuit board into a plurality of regions to generate a compensation matrix, thereby compensating the coordinates of the pads based on the curvature or twist of the substrate for each subdivided region. Methods. Background technique [0002] Generally, at least one printed circuit board (printed circuit board; PCB) is provided inside the electronic device, and a circuit patt...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00G01B11/30G01N21/956
CPCG01N21/956G01N21/8851G06T7/0006G06T7/001G06T2207/30141G06T2207/30168G06T5/80G01B11/306
Inventor 郑升源崔钟镇金资根
Owner GAOYING TECH CO LTD
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