Sample testbed for EBSD (Electron Back-Scattered Diffraction) testing

Abstract

The invention discloses a sample testbed for EBSD (Electron Back-Scattered Diffraction) testing, relating to a sample testbed and solving the problems that, when being adhered to a sample testbed with a conductive adhesive, a sample will move in a testing process, the position of an image is likely to change, a back scattering region deviates, and the testing result is inaccurate. A guide rail is obliquely and fixedly arranged on the upper end surface of a base; a dovetail groove is machined in the upper end surface of the guide rail; an included angle between the length direction and the vertical direction of the dovetail groove of the guide rail is 70 degrees; the upper part of a sliding block is of a cuboid shape, and the lower part of the sliding block is of a dovetail shape; the lower part of the sliding block is positioned in the dovetail groove of the guide rail and is in sliding connection with the dovetail groove; an included angle between the upper end surface and the vertical direction of the sliding block is 70 degrees; the lower part of a limiting plate is detachably connected with the lower part of the guide rail; a jackscrew is arranged in the middle of the limiting plate, and one end of the jackscrew is in contact with the sliding block. The sample testbed disclosed by the invention is used for EBSD testing.

Description

technical field [0001] The invention relates to a sample test bench, in particular to a sample test bench for EBSD testing. Background technique [0002] In a scanning electron microscope (SEM), an electron beam incident on a sample interacts with the sample to produce several different effects, one of which is diffraction on regularly arranged lattice planes within each crystal or grain. Diffraction from all atomic planes constitutes a "diffraction pattern", which can be viewed as a map of the angular relationship between atomic planes in a crystal. Since the 1990s, the analysis technology of electron backscattering patterns (EBSP for short) crystal micro-region orientation and crystal structure assembled on SEM has made great progress, and has been applied in the microstructure of materials and microweave. Widely used in structural representation. This technique is also called Electron Backscattered Diffraction (EBSD for short) or Orientation Imaging Microscopy (OIM for ...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem that the sample stuck on the sample test bench with conductive adhesive will move during the test, the position of the image will easily change, and the backscattering area will shift, resulting in inaccurate test results, and further provides a method for EBSD Sample Test Bench for Testing

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