Base plate detection device, base plate detection method and base plate detection module
A substrate detection and detection module technology, applied in instruments, nonlinear optics, optics, etc., can solve the problems of low accuracy and improve the accuracy
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[0080] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments . Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0081] Please refer to figure 1 , which shows a schematic structural view of a substrate detection device 00 provided in the prior art, see figure 1 , the substrate detection device 00 includes: a height measuring sensor 001 and a sensor bracket 002, the height measuring sensor 001 is a semi-cylindrical structure, the semi-cylindrical structure is surrounded by two parallel bottom surfaces, a plane perpendicular to any bottom surface and a...
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