Surface treatment equipment and surface treatment method
A surface treatment and equipment technology, applied in the field of low temperature treatment surface treatment equipment and surface treatment, can solve the problems of difficulty in obtaining uniform temperature and uneven nitriding treatment of articles, and achieve the prevention of changes in mechanical and chemical properties, uniform treatment, and uniform distribution effect
Active Publication Date: 2018-02-09
嘉泉大学敎产学协力团
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Problems solved by technology
However, since these methods do not use heating equipment but directly ion-sputter the article, it takes a long time to heat the article, and ion sputtering is locally generated according to the shape of the article, and thus it is difficult to obtain a uniform temperature
Therefore, when processing an extremely large number of items, there is a phenomenon that the nitriding treatment of the items is not uniform
Method used
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[0036] Hereinafter, embodiments will be described in more detail with reference to the accompanying drawings. However, this invention may take different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
[0037] figure 1 A schematic cross-sectional view illustrating a surface treatment apparatus according to an embodiment of the present invention;
[0038] see figure 1 , the processing equipment used in the present invention may include: a reaction tube 100, wherein a reaction space is provided; a heating part 200 arranged outside the reaction tube 100, which is used to heat the reaction tube 100 to a predetermined temperature; a first electrode 300 and a second electrode 300 Two electrodes 400, which are arranged to face each other inside the reaction tube 100; a power sup...
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Abstract
Disclosed are a surface treatment apparatus and a surface treatment method, the surface treatment apparatus comprising: a reaction tube for accommodating a workpiece, the reaction tube being provided with a reaction space on the inner side thereof,a heating unit for heating the reaction tube to a predetermined temperature, the heating unit being disposed on the outer side of the reaction tube,first and second electrodes which are disposed to face each other on the inner side of the reaction tube, with at least one workpiece being interposed between the first and second electrodes,a power supply unit for supplying power to the first and second electrodes,and a reaction gas supply unit for supplying reaction gas to the inner side of the reaction tube.
Description
technical field [0001] The present invention relates to a surface treatment device and a surface treatment method, and more specifically, to a surface treatment device and a surface treatment method capable of low-temperature treatment. Background technique [0002] Surface treatment is performed in order to satisfy the mechanical and electrochemical characteristics required for various components used in tools, components used in transmission equipment, chemical and power generation equipment, and the like. In particular, working conditions have become severe due to power generation and chemical facilities and mechanical components used recently under high temperature, high pressure, strong acid atmosphere, etc. In addition, higher mechanical and electrochemical characteristics are required due to the increased requirements of high performance and durable life. [0003] Surface treatment methods include heat treatment methods, nitriding treatment methods and carbonization ...
Claims
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IPC IPC(8): C23C16/50C23C16/52
CPCC23C8/24H01J37/00
Inventor 尹荣秀池昇炫李锡熙李江洙禹盛弼孙永辰
Owner 嘉泉大学敎产学协力团