Ultra-precise low-speed ball screw linear feeding device

A technology of ball screw and linear feed, which is applied in feeding devices, large fixed members, metal processing machinery parts, etc., can solve the problems of strong magnetic field, poor stability and dynamic performance of the device, inconvenient assembly and disassembly, etc. Achieve the effect of ultra-low speed smooth linear motion, reduce friction and fluctuation

Inactive Publication Date: 2016-06-15
TSINGHUA UNIV
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  • Application Information

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Problems solved by technology

Linear motors have the advantages of simple structure and high dynamic performance, and have been widely used in domestic industries, but their application in low-speed feed transmission is not very common. In this environment, permanent magnet linear motors are mainly used, but their existence Strong magnetic field, demagnetization, inconvenient assembly and disassembly, direct drive is easy to introduce vibration, which makes the stability and dynamic performance of the device worse, which reduces the low-speed stability of the linear feed device

Method used

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  • Ultra-precise low-speed ball screw linear feeding device
  • Ultra-precise low-speed ball screw linear feeding device

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Embodiment Construction

[0029] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be emphasized that the following description is only exemplary and not intended to limit the scope of the invention and its application.

[0030] Such as figure 1As shown, the structure of the ultra-precision low-speed ball screw linear feed device is: the guide rail base 1 is U-shaped, and the upper part of one side is provided with the first side guide rail 2 and the first upper side guide rail 4 sequentially from bottom to top, and the other The upper part of one side is provided with the second side guide rail 3 and the second upper side guide rail 5 successively from bottom to top, and the left and right sides of the guide rail base 1 are parallel to each other and equal in height, and the first side guide rail 2 and the second side guide rail 3 are connected to each other. Parallel and equal height, the first upper side guide rai...

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Abstract

The invention relates to an ultra-precise low-speed ball screw linear feeding device. A servomotor drives a ball screw to rotate for driving a screw nut to move, and the screw nut drives a worktable to slowly and stably move along a guide rail through a flexible hinge elastic mechanism. The flexible hinge elastic connection mechanism comprises a square rigid connection inner platform positioned inside and a frame-shaped rigid connection outer platform positioned outside; the rigid connection inner platform is connected with the rigid connection outer platform through flexible hinge units; and the flexible hinge units are arranged in a parallel combination form of straight-girder-shaped flexible hinges and symmetrically distributed. A screw nut seat is connected with the rigid connection inner platform, and the rigid connection outer platform is connected with the worktable. By adopting the flexible hinge elastic mechanism, the influence on the motion straightness of the worktable due to the bending of the ball screw can be effectively reduced, the ultra-low-speed stable linear motion is realized, and the requirements of machining optical parts by a diamond fly cutting machine tool are met.

Description

technical field [0001] The invention belongs to the technical field of ball screw linear feed devices, in particular to an ultra-precision low-speed ball screw linear feed device. Background technique [0002] As an important support for the development of modern high technology, ultra-precision machining technology is an important symbol to measure a country's scientific and technological level, and plays an extremely important role in the fields of IC manufacturing, aerospace and nuclear weapon manufacturing. With the rapid development of aerospace, high-precision instrumentation, inertial navigation platform, optics and laser technologies and their wide application in many fields, the processing of various high-precision complex parts, optical parts, high-precision planes, curved surfaces and complex shapes The need is increasingly urgent. [0003] Diamond flying cutting machine tool is an important equipment for processing optical parts. When processing parts with high ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23Q5/40B23Q1/38B23Q1/01B23Q5/44
CPCB23Q1/017B23Q1/38B23Q5/402B23Q5/44
Inventor 李铁民杜云松姜峣李福华张京雷贾石李逢春
Owner TSINGHUA UNIV
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