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Multi-piece large-area single-sided or double-sided superconducting thin film substrate fixture

A technology of superconducting thin film and substrate clip, applied in the manufacture/processing of superconductor devices, metal material coating process, coating, etc., can solve the problems of inconvenient installation process, affecting production efficiency, low production efficiency, etc., to achieve Save installation time, improve production efficiency, and facilitate installation

Active Publication Date: 2018-06-26
北京鼎臣世纪超导科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The problem with this jig is that only one piece of superconducting film can be fired at a time, the production efficiency is low, and the production cost is high; and the main jig needs to cooperate with the auxiliary jig, and the circular jig of the main jig and the semicircular groove of the auxiliary jig need to be carefully adjusted during use. position, so that the upper side of the semicircular groove of the auxiliary fixture completely coincides with the lower semicircle of the circular fixture of the main fixture, and at the same time ensure that the upper plane of the semicircular groove and the upper plane of the upper semicircle of the circular fixture are on the same plane, so that The single fixed claw B on the lower semicircle of the circular fixture of the main fixture and the fixed claw C on the inner edge of the semicircular ring of the auxiliary fixture form a pair of completely symmetrical fixed claws up and down, and the upper plane of the fixed claw C is fixed in the circular fixture The upper plane of claw A is on the same plane
Therefore, the installation process is inconvenient and requires careful adjustment, which affects production efficiency

Method used

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  • Multi-piece large-area single-sided or double-sided superconducting thin film substrate fixture
  • Multi-piece large-area single-sided or double-sided superconducting thin film substrate fixture
  • Multi-piece large-area single-sided or double-sided superconducting thin film substrate fixture

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Put a plurality of substrates coated with superconducting thin films into the fixture of the present invention sequentially according to the above method, and in a heat treatment furnace at a temperature of 600-900 ° C, the fixture is driven by a motor to rotate continuously at a constant speed around its axis for 60 hours, and the prepared The multiple superconducting thin film substrates are intact and have good performance, and the performance of the multiple superconducting thin film substrates is consistent.

Embodiment 2

[0029] A plurality of substrates coated with a superconducting thin film are sequentially loaded into the fixture of the present invention according to the above method, and in a heat treatment furnace at a temperature of 600-900°C, the fixture is driven by a motor to reciprocate for 60 hours, and the multi-chip superconducting film is prepared. The conductive thin film substrates are all intact and have good performance, and at the same time, the performances of multiple superconductive thin film substrates are consistent.

[0030] Compared with the prior art, the multi-piece large-area single-sided or double-sided superconducting thin film substrate clamp of the present invention has the following beneficial effects:

[0031] 1. In the present invention, the substrate holder includes a plurality of semicircular fixed fixtures and a plurality of semicircular movable fixtures, which realizes firing multiple superconducting thin film substrates at one time, improves the producti...

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Abstract

The invention belongs to the technical field of batch production of large-area single-sided or double-sided superconducting thin films by chemical solution method, and aims to provide a novel multi-chip large-area single-sided or double-sided superconducting film that is easy to use, improves production efficiency, and reduces production costs. Conductive film substrate fixture, the substrate clamp includes multiple semicircular fixed fixtures and semicircular movable fixtures, which realizes firing multiple superconducting film substrates at one time, improves the production efficiency of superconducting films, and reduces production costs , without damaging the sample, while ensuring the batch consistency of the sample. When using, first clamp the substrate with tweezers and put it into the first fixed claw of the semicircular fixing fixture, fix it with tweezers, and then fasten the semicircular movable fixture with the semicircular fixing fixture, so that the substrate is in the substrate holder In the four fixed claws, the first connecting ear and the second connecting ear can be fixed together, and the semi-circular movable clamp and the semi-circular fixed clamp can be assembled together without redundant adjustments. The installation is very convenient and economical. installation time.

Description

technical field [0001] The invention belongs to the technical field of mass production of large-area single-sided or double-sided superconducting thin films by using a chemical solution method, and in particular relates to a multi-piece large-area single-sided or double-sided superconducting thin film substrate fixture. Background technique [0002] Because YBCO high-temperature superconducting thin films have good application prospects in the field of wireless communication, domestic research on large-area superconducting thin films lags behind some developed countries, and research on high-temperature superconducting microwave devices in my country urgently needs domestic research on large-area YBCO double-sided thin films as a support. At present, the chemical solution method has been extensively studied in the preparation of large-area single-sided or double-sided superconducting thin films. This method does not require vacuum systems and expensive equipment, is low in co...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C26/00H01L39/24H10N60/01
CPCC23C26/00H10N60/01
Inventor 王三胜
Owner 北京鼎臣世纪超导科技有限公司
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