Novel high-precision MEMS accelerometer

Abstract

The invention relates to an accelerometer, in particular to an MEMS accelerometer. Specifically, a high speed digital quantization unit is embedded in a sigma-delta full closed-loop circuit of the MEMS accelerometer, and through signal estimation and processing, an MEMS full closed-loop sigma-delta system consisting of a low bit quantizer can achieve full digital closed-loop and high bit digital quantization output. Through a signal processing algorithm and the system stability design, the invention achieves digital feedback while achieving feedback electrostatic force quantization. Meanwhile, a loop filter is realized in a digital manner, an integral windup phenomenon generated by an analog loop filter can be avoided, the layout design difficulty and the influence of noises force the analog loop filter on the system are also reduced, and Tehran performance of the MEMS accelerometer is effectively improved.

Description

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AI Technical Summary

Benefits of technology

This technology improves on existing sensors with improved performance compared to current methods such as linear or rotational acceleration measurement systems. It achieves this by implementing an electronic device called a ring oscillator (RON), instead of just one component like other components. By controlling these factors based on input signals from external sources, better matching between detected values can be achieved without compromising precision. Additionally, the use of advanced techniques allows for precise parameter tunings within the feedback path of the controlled process. Overall, this innovation enhances the overall functionality and reliability of the detective devices while reducing their cost.

Problems solved by technology

This patented describes a problem that arises when implementing conventional electrostatic inertia sensory systems (ESIAS). Specifically, these devices require precise measurements over long periods of operation without losing data or causing instabilities during use. Current solutions involve expensive components like inductive pressure transducers, but they lack flexibility and adaptable features. Therefore there needs improvement techniques to address issues related to current ESI AS technologies including reduced cost, increased functionality, improved efficiency, better linear response, higher resolution capabilities, etc., while also improving overall performance.

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