Device and method for measuring workpiece characteristics
A measurement device and measurement method technology, which is applied in the direction of measurement devices, single semiconductor device testing, electrical measurement, etc., can solve problems such as inability to perform correct measurements, tilting workpiece posture, and increased contact resistance
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[0070] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
[0071] First, the workpiece W1 measured by the workpiece characteristic measuring apparatus of the present invention will be described. First, the three-dimensional view of the workpiece W1 is shown in figure 2 . The workpiece W1 is a light emitting diode (LED) including a main body W1x, electrodes W1a and W1b formed on the lower surface of the main body W1x, and a light-emitting body W1p. will be from figure 2 In the E1 direction, the F1 direction, the G1 direction, and the H1 direction to observe the workpiece W1, the diagrams are shown in image 3 (a)(b)(c)(d). like image 3 As shown in (a) (b) and (c), the light-emitting body W1p has a shape that covers the upper surface of the main body W1x and protrudes upward from the upper surface.
[0072] Furthermore, the light-emitting body W1p has an edge portion W1e slightly protruding toward the periph...
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