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Micromirror arrangement

A technology of micro-mirrors and mirrors, applied in micro-structure devices, micro-electronic micro-structure devices, micro-structure devices composed of deformable elements, etc., can solve problems such as unfavorable scaling behavior of electrostatic force, etc.

Active Publication Date: 2016-08-10
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the case of this two-axis scanner, the electrode distance can be kept small, but an unfavorable scaling behavior of the electrostatic forces also occurs with this approach

Method used

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Embodiment Construction

[0037] figure 1 and figure 2 A micromirror arrangement according to the invention is schematically shown. The mirror plate 1 is thus suspended biaxially movable via the schematically indicated spring element 2 in the middle of an annular drive plate 3 surrounding the mirror plate 1 , wherein the drive plate 3 itself is suspended via the spring element (in the current In this case, four spring elements 4) are suspended in the stationary part 5 of the actuator chip formed by the mentioned elements. The drive device 11 for the biaxial drive of the drive plate 3 is shown only in a schematic manner. In the illustrated embodiment, the mirror plate 1 and the drive plate 3 are designed in a circular manner, but they can also have a different shape (for example a polygonal shape).

[0038] The illustrated spring elements 2 and 4 are schematically illustrated and can have the most diverse shapes. They can be designed as discrete spring elements each assigned to one shaft, but also ...

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Abstract

What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate (1) and first spring elements (2); a second spring-mass oscillator, which has a drive plate (3) and second spring elements (4) and which is connected to a carrier arrangement (5, 8, 9) via the second spring elements (4), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (2); and a drive arrangement (11), which is assigned to the drive plate and is designed to cause the drive plate (3) to oscillate. The oscillatory body (1) is suspended, movably on two axes, via the first spring elements (2) on the drive plate (3), and the drive plate (3) is connected, movably on two axes, to the carrier arrangement (5, 8, 9), wherein the drive arrangement (11) is embodied as a two-axis drive and is designed to drive the drive plate (3) on two axes such that the oscillatory body (1) oscillates on two axes at in each case one of its orthogonal eigenmodes or close to this eigenmode.

Description

technical field [0001] The invention relates to a micromirror arrangement according to the preambles of the independent claims. Background technique [0002] For many applications of micromirror devices, it is desirable to simultaneously have as large a mirror diameter as possible (e.g., greater than 7mm), as high a resonant frequency (i.e., a high scanning frequency) as possible (e.g., greater than 7kHz) and as much as possible. Large deflection angles (eg greater than 10°) are possible. [0003] A micromirror arrangement is known from US 5543956 in which a uniaxial spring-mass oscillator is suspended in another spring-mass oscillator. Accordingly, a drive unit capable of exciting the further spring-mass oscillator to oscillate is assigned to the further spring-mass oscillator, in such a way that the suspended uniaxial spring-mass oscillator is likewise excited to oscillate. The uniaxial spring-mass oscillator comprises an oscillating body designed as a mirror and suspend...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08G02B26/10B81B3/00
CPCB81B3/0043B81B2201/042B81B2203/0163B81B2203/058G02B26/0833G02B26/0841G02B26/101
Inventor 乌尔里希·霍夫曼弗兰克·森格尔托马斯·冯万顿赫克里斯蒂安·马拉斯约阿希姆·简斯
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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