position detection device
A technology for mounting parts and magnetic heads, which is applied in the direction of using electric/magnetic devices to transmit sensing components, etc., can solve the problems of magnetic heads that cannot be in contact with acids and organic substances, cannot use strong magnetic force, and product scrapping, etc., to reduce poor induction Chance, prevent poor induction, enhance the effect of magnetic induction
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[0025] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0026] see figure 2 and image 3 , the present invention provides a position detection device, which can be used for substrate position detection in wet etching equipment, including: a base 1, a mounting part 3 located on the base 1, and a lever that can be rotatably mounted on the mounting part 3 2. The magnetic head 4 installed on one end of the lever 2, one end can be rotatably connected to the linkage rod 5 at the end of the lever 2 close to the magnetic head 4, the magnetic shield plate 7 that can be rotatably connected to the other end of the linkage rod 5, and the magnetic shield installed on the base 1 Signal line sensing terminal 6.
[0027] Specifically, see figure 2 , when no external force is applied to the lever 2, one end of...
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