SON (Silicon on Nothing) deformation mechanism study method based on phase field model at high temperature
A silicon-based microstructure and model technology, applied in the micro-nano field, can solve problems such as the limitations of understanding particle diffusion
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[0049] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0050] The drawings involved in this embodiment are all simplified schematic diagrams, and only illustrate the basic structure of the present invention in a schematic manner, therefore, only the structures related to the present invention are shown.
[0051] build as figure 1 As shown in the experimental bench, the silicon-based microstructure material used is a polished 6-in (100) n-type silicon wafer; the raw material is put into an environment of 88° C. to make it soft for 90 seconds; the processed The samples were produced using ion etching machine as figure 2 The U-shaped cylindrical hole shown;
[0052] like image 3 As shown, the above-mentioned U-shaped cylindrical hole sample was placed in an environment of 1150 ° C for 3 minutes;
[0053] like Figure 4As shown, the schematic diagram of the morphology change of the silicon...
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