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turbomolecular pump

A turbomolecular pump and fixed wing technology, applied in the direction of pumps, axial flow pumps, pump components, etc., can solve problems such as troublesome contact of products, and achieve the effect of suppressing accumulation

Inactive Publication Date: 2019-03-19
SHIMADZU SEISAKUSHO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In recent years, in the etching process of semiconductor manufacturing equipment or liquid crystal manufacturing equipment, the following problems have occurred: accumulation of products on the vacuum pump, resulting in increased troubles such as the rotor of the vacuum pump coming into contact with the products, or the need for a short time after the operation of the device. Overhaul, etc.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach -

[0054] figure 1 It is a cross-sectional view showing the first embodiment of the turbomolecular pump of the present invention. The turbomolecular pump 1 includes a rotor 10 in which a multi-stage rotor blade 12 and a rotor cylindrical portion 13 are formed. A rotor shaft 11 is fixed to the rotor 10. The rotor shaft 11 is supported by a radial magnetic bearing 32 and an axial magnetic bearing 33, and is rotationally driven by a motor 34.

[0055] When the magnetic bearing 32 and the magnetic bearing 33 are not operating, the rotor shaft 11 is supported by the mechanical bearing 35a and the mechanical bearing 35b. The radial magnetic bearing 32, the axial magnetic bearing 33, the electric motor 34, and the mechanical bearing 35b are housed in a base 30 fixed to the housing 20. In addition, in the present embodiment, the housing 20 and the base 30 are separated, but the housing 20 and the base 30 may be formed integrally.

[0056] Inside the pump casing 23, a multi-stage fixed wing...

no. 2 approach -

[0075] Fig. 4(a) and Fig. 4(b) are diagrams illustrating the second embodiment of the turbomolecular pump of the present invention. 4(a) and 4(b) are diagrams corresponding to FIGS. 2(a) and 2(b) of the first embodiment, FIG. 4(a) is a plan view of the spacer 29B, and FIG. 4(b) It is the A2-A2 section view. In the second embodiment, the annular region from the radius r1 to the radius r2 of the spacer 29B is the thermal resistance portion 390. The thermal resistance portion 390 includes an annular non-penetrating groove 390a and a connecting portion 390b constituting the bottom surface of the groove. On the front surface 295 and the back surface 296 of the spacer 29B, a recessed portion 295a and a recessed portion 296a are formed such that the inner peripheral portion 291 and the rib 211 of the fixed wing 21 are not in contact with each other.

[0076] In the second embodiment, by providing the non-through groove 390a as the thermal resistance portion 390, the inner peripheral p...

no. 3 approach -

[0079] 5(a), 5(b), 6(a), and 6(b) are diagrams illustrating a third embodiment of the turbomolecular pump of the present invention. Figures 5(a) and 5(b) are diagrams corresponding to Figures 2(a) and 2(b) of the first embodiment, Figure 5(a) is a plan view of the spacer 29B, and Figure 5(b) It is the A3-A3 sectional view. The annular region from the radius r1 to the radius r2 of the spacer 29B is the thermal resistance portion 490. The thermal resistance part 490 has a labyrinth structure provided with three annular non-through grooves 490a to 490c with different radii. The non-through groove 490a and the non-through groove 490c are provided on the surface 295 side, and the non-through groove 490b is provided on the back surface 296 side. The other configuration is the same as that of the spacer 29B shown in Figs. 2(a) and 2(b). In addition, the number of non-through grooves is not limited to three.

[0080] Fig. 6(a) is a view showing a cross section of a state in which the...

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Abstract

The present invention provides a turbo molecular pump capable of suppressing accumulation of a product on an inner peripheral surface of a spacer. A turbo molecular pump (1) is provided with a plurality of fixed blades (21) laminated via an annular spacer (29B) and a plurality of rotary blades (12) rotating with respect to the plurality of fixed blades (21), and the spacer (29B) is provided with a thermal resistant portion (290) for suppressing heat transfer from the inner peripheral portion (291) of the spacer (29B) to the outer peripheral portion (292).

Description

Technical field [0001] The present invention relates to a turbomolecular pump suitable for discharging gas that easily generates accumulation of products. Background technique [0002] Conventionally, vacuum pumps such as turbomolecular pumps have been used for exhaust of chambers in semiconductor manufacturing equipment or liquid crystal manufacturing equipment. In recent years, in the etching process of semiconductor manufacturing equipment or liquid crystal manufacturing equipment, the following problems have arisen: accumulation of products on the vacuum pump causes increased troubles such as contact between the rotor of the vacuum pump and the products, or the need for short-term operation after the device is operated Overhaul etc. [0003] The solidification and accumulation of the product depend on its vapor pressure, and the solidification and accumulation tend to be suppressed in a lower pressure and higher temperature environment. Therefore, in turbomolecular pumps incl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04F04D29/58
CPCF04D19/042F04D29/582
Inventor 坪川彻也
Owner SHIMADZU SEISAKUSHO CO LTD