Liquid particle detection device

A detection device, a technology for liquid particles, applied in measurement devices, particle and sedimentation analysis, particle size analysis, etc., can solve the problems of limited detection accuracy, low detection sensitivity, limited scattered light range, etc., to achieve improved detection accuracy, enhanced Detection sensitivity, the effect of enhanced optical signal strength

Inactive Publication Date: 2016-10-12
JIANGSU SUJING GROUP +1
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

Therefore, most of the existing liquid particle counters can accept a limited range of scattered light, and the detection sensitivity is low, and the detection accuracy is also very limited.

Method used

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  • Liquid particle detection device
  • Liquid particle detection device

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Embodiment Construction

[0021] Such as Figure 1 to Figure 3 As shown, a liquid particle detection device according to the present invention includes a light source unit, a liquid circulation unit, a scattered light optical signal collection unit, an optical signal processing unit and an aperture 14 .

[0022] The liquid circulation unit includes a flow cell 4 , a front plano-convex lens 9 , a left plano-convex lens 10 and a right plano-convex lens 11 . The flow cell 4 is made of one of quartz glass, sapphire and ruby. The flow cell 4 is in the shape of a cuboid, and the side length of the flow cell 4 is 10mm-20mm. The front plano-convex lens 9 is attached to the front side of the flow cell 4, the left plano-convex lens 10 is attached to the left side of the flow cell 4, and the right plano-convex lens 11 is attached to the right side of the flow cell 4. side. The front plano-convex lens 9, the left plano-convex lens 10 and the right plano-convex lens 11 are all fixed on the flow cell 4 by glu...

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PUM

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Abstract

The invention relates to a liquid particle detection device, comprising a light source unit, a liquid flow unit, a scattering light optical signal collecting unit and an optical signal processing unit; the liquid flow unit comprises a flow tank provided with a passage for flowing of a liquid; the light source nit can create an incoming beam, and the flow tank is disposed on a propagation path of the incoming beam; the scattering light optical signal collecting unit comprises a front lens, a left lens, a right lens and a fiber coupler, and the fiber coupler is connected with the optical signal processing unit. The lenses arranged in the front and on left and right of the flow tank can converge scattering light from multiple directions, the scattering light is then coupled by the fiber coupler and transmitted to the optical signal processing unit, it is detected that strength of the acquired optical signal is enhanced, processing by the optical signal processing unit is facilitated, small particles may be recognized and detected, and detection sensitivity of the liquid particle detection device is enhanced.

Description

technical field [0001] The invention belongs to the field of liquid particle detection, in particular to a device for detecting the quantity and size of particles in liquid. Background technique [0002] Currently, the main device used to detect tiny particle contamination in liquids is the liquid particle counter. It has an important application in semiconductor process control, such as used to detect the cleanliness of ultrapure water or chemical reagents. The smallest particle size it measures is 50 nanometers or even smaller. The light scattering method is the main detection method adopted by the liquid particle counter at present. Scattering occurs when a beam of light hits a particle, and the scattered light can be divided into forward scattered light and side scattered light. The forward scattered light refers to scattered light whose optical axis is parallel to that of the irradiated light. The side scattered light refers to scattered light whose optical axis is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N15/02
CPCG01N15/0205
Inventor 孙吉勇梁凤飞戴圣洋金惠琴
Owner JIANGSU SUJING GROUP
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