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A small size mask plate fixing device

A technology of fixing device and mask plate, which is applied in the fields of electric solid device, semiconductor/solid device manufacturing, cleaning method using liquid, etc., can solve the problems of high cost, difficulty and increased cost of transformation

Active Publication Date: 2019-11-26
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This will lead to complex equipment, increase unknown technical risks, and the cost increase caused by the improvement will inevitably be reflected in the equipment price and will be borne by the equipment buyer; the equipment buyer needs to be compatible with cleaning masks of other specifications in the future. Larger-scale transformation of equipment is difficult and costly

Method used

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  • A small size mask plate fixing device
  • A small size mask plate fixing device
  • A small size mask plate fixing device

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Experimental program
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Embodiment Construction

[0030] The specific implementation of a small-sized mask plate fixing device provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0031] see Figure 5 and Figure 6 , a small-sized mask fixing device of the present invention includes an outer frame 20 and a fixing groove 21 for fixing the small-sized mask 22 . The outer frame 20 can be snapped into a standard mask fixing jig (inside the CST) of a mask cleaning device.

[0032] The small-sized mask plate fixing device is used to fix the small-sized mask plate 22, and the structure of the small-sized mask plate 22 is shown in figure 2 .And the small-sized mask fixing device can be snapped into the mask standard fixing fixture (CST) of the mask cleaning device, so that the small-sized mask fixed on the small-sized mask fixing device The mask plate 22 is cleaned as Figure 6 shown. The standard fixing fixture for the mask plate in the present invention means that...

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Abstract

The present invention provides a small-sized mask fixing device, which is used for mask cleaning. The small-sized mask fixing device includes an outer frame and a fixing groove for fixing the small-sized mask , the fixing groove is arranged in the outer frame, and the outer frame can be snapped into a standard mask fixing jig of a mask cleaning device. The advantages of the present invention are: on the premise of not changing the hardware structure of the cleaning device, it solves the requirement of cleaning masks compatible with large and small sizes, and does not affect the automatic operation mode of the automatic cleaning machine.

Description

technical field [0001] The invention relates to the field of organic electroluminescent technology (Organic Light Emitting Diode, OLED), in particular to a small-sized mask fixing device. Background technique [0002] Organic Light Emitting Diode (OLED) is a new type of display and lighting technology. [0003] Vacuum evaporation technology is generally used to prepare OLED thin films, that is, organic / metal materials are heated in a vacuum environment (~10-5Pa), the materials are sublimated by heat, and a certain pattern is formed on the surface of the substrate through a mask with a special pattern. Shaped organic\metallic thin films. After continuous deposition and film formation of various materials, an OLED structure with multi-layer thin films can be formed. [0004] During the process as described above, most of the materials (organic or metal materials) are deposited on the inner wall of the evaporation chamber and the surface of the mask. When the organic or meta...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/687H01L21/02H01L51/56B08B3/10B08B11/02
CPCH01L21/02041H01L21/02082H01L21/68778B08B3/10B08B11/02H10K71/00
Inventor 蒋谦
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD