A small size mask plate fixing device

A technology of fixing device and mask plate, which is applied in the fields of electric solid device, semiconductor/solid device manufacturing, cleaning method using liquid, etc., can solve the problems of high cost, difficulty and increased cost of transformation
CN106057726BActive Publication Date: 2019-11-26WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
Publication Date
2019-11-26

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Abstract

The present invention provides a small-sized mask fixing device, which is used for mask cleaning. The small-sized mask fixing device includes an outer frame and a fixing groove for fixing the small-sized mask , the fixing groove is arranged in the outer frame, and the outer frame can be snapped into a standard mask fixing jig of a mask cleaning device. The advantages of the present invention are: on the premise of not changing the hardware structure of the cleaning device, it solves the requirement of cleaning masks compatible with large and small sizes, and does not affect the automatic operation mode of the automatic cleaning machine.
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Description

technical field

[0001] The invention relates to the field of organic electroluminescent technology (Organic Light Emitting Diode, OLED), in particular to a small-sized mask fixing device. Background technique

[0002] Organic Light Emitting Diode (OLED) is a new type of display and lighting technology.

[0003] Vacuum evaporation technology is generally used to prepare OLED thin films, that is, organic / metal materials are heated in a vacuum environment (~10-5Pa), the materials are sublimated by heat, and a certain pattern is formed on the surface of the substrate through a mask with a special pattern. Shaped organic\metallic thin films. After continuous deposition and film formation of various materials, an OLED structure with multi-layer thin films can be formed.

[0004] During the process as described above, most of the materials (organic or metal materials) are deposited on the inner wall of the evaporation chamber and the surface of the mask. When the organic or meta...

Claims

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