Transfer printing method of micro light emitting diode array
A technology of micro-light-emitting diodes and arrays, which is applied in semiconductor devices, electrical components, semiconductor/solid-state device manufacturing, etc., and can solve problems such as inability to adapt to pattern structures
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[0026] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0027] see figure 1 , the present invention provides a transfer printing method of a micro light emitting diode array, comprising the following steps:
[0028] Step 1, such as Figure 2-3 As shown, a transfer head 50 and a carrier substrate 10 are provided, on which several micro LEDs 40 are arranged, and the transfer head 50 is used to pick up the micro LEDs 40 on the carrier substrate 10 .
[0029] Specifically, the transfer head 50 may be a PDMS transfer head, including a PDMS film layer, and the PDMS film layer has several raised structures 51 arranged in an array. In the step 1, the protrusions of the PDMS film layer are used The structure 51 picks up the micro light emitting diodes 40 through the adsorption force. In addition, the tra...
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