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Vacuum Exhaust

A technology of vacuum exhaust and bearing device, which is applied to electromechanical devices, connection with grounding devices, and components of pumping devices for elastic fluids, etc. The effect of preventing galvanic corrosion

Active Publication Date: 2018-10-09
ULVAC KIKO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The rotating shaft of the three-phase motor is rotatably supported by metal bearing devices at both ends, but there is a problem that the potential of the rotating shaft rises and discharge occurs inside the bearing.
[0007] However, contacting the rotating shaft with a conductive brush connects the rotating shaft to the ground potential, reduces the voltage generated on the bearing device, and prevents discharge. For this reason, expensive brushes are used, which increases the cost.

Method used

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Examples

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Embodiment Construction

[0039]

[0040] figure 1 Reference numeral 10 denotes a rotary pump as an example of the vacuum exhaust device of the present invention, figure 2 represents its interior.

[0041] This vacuum exhaust device 10 has a motor unit 17 , a pump unit 18 , and a base plate 19 (placement plate).

[0042] The motor unit 17 is a three-phase motor and has a conductive motor case 20 . Inside the motor housing 20, a motor main body 21 that rotates a drive shaft 25 including a motor rotor 21 in the motor section 17 is disposed. 1 and motor stator 21 2 and other parts.

[0043]A power supply unit 28 is disposed outside the motor case 20 . An inverter is disposed inside the power supply unit 28 , and the three-phase AC voltage input to the power supply unit 28 is converted into a desired frequency by the inverter and supplied to the motor stator inside the motor main body 21 . A motor rotor is arranged inside the motor stator, and the motor rotor rotates at a desired speed by the freq...

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Abstract

The present invention is configured so that electric erosion does not occur in a bearing device of an evacuation apparatus. A receiving hole 51 is provided in a seat 53 of a first base 50a of an evacuation apparatus 10 and adhesive that has moved down from a base-side adhesive layer 38 provided on the adhesive surface 54 of a back plate section 55 is received in the receiving hole 51 from an opening 58 located in a seat surface 57 so that the adhesive does not intrude between the outer ring 42 of a first bearing device 40a and the seat surface 57. Because the outer ring 42 and the seat surface 57 are in contact and the outer ring 42 and the first base 50a are electrically connected, the outer ring 42 is connected to a pump case 30 via the first base 50a and as a result, is grounded. Because the potential of an inner ring 43 and rolling elements 45 is reduced, electric erosion inside the first bearing device 40a is prevented.

Description

technical field [0001] The present invention relates to the technology of vacuum exhaust device, especially relates to the technology of preventing electric corrosion on the bearing device. Background technique [0002] Vacuum exhaust devices called rotary pumps (oil-sealed rotary pumps) can be roughly classified into three types: rotary vane pumps, cam pumps, and swing piston pumps, but any type of vacuum exhaust device has A three-phase motor (three-phase electric motor) and a rotating or oscillating rotor. [0003] In a three-phase motor, an inverter (inverter) converts it into a three-phase AC voltage of a desired frequency, and the three-phase AC voltage rotates a motor rotor in the three-phase motor to rotate a drive shaft. [0004] The rotor attached to the rotary shaft rotates or swings by the rotation of the drive shaft. By the operation of the rotor, the vacuum exhaust device sucks the air in the vacuum chamber from the suction port, and discharges it to the atmos...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16C35/067F04B39/00F04C29/00F16C19/06H02K5/16H02K11/00
CPCF04B39/00F04C29/00F16C19/06F16C35/067H02K5/16H02K11/00F04C25/02F04C29/0085F04C2240/40F04C2240/50F04C2280/04H02K5/161H02K11/40
Inventor 儿玉纯一宫下敏郎周防原显糸山龙二
Owner ULVAC KIKO