Method for rapidly analyzing micro-impurities in micro-gas by quadrupole mass spectrometer

Abstract

The invention discloses a method for rapidly analyzing micro-impurities in micro-gas by a quadrupole mass spectrometer. A micro-current amplification and acquisition circuit adopts two high-resistance gears with the difference of three scale resistance values, different gains are set at each gear, the high-resistance gear with the larger resistance value is used for amplifying tiny signals, the high-resistance gear with the smaller resistance value is used for amplifying large signals, and intermediate signals can be analyzed by setting the gains in different gears. Ion flow outputted by an electron multiplier is scanned in a sectioned manner by controlling automatic switching of the high-resistance gears of an amplifier in the micro-current amplification and acquisition circuit through a computer, different scanning speeds are adopted under different high-resistance gears by software, and both rapid scanning and trace sensitivity can be finally realized by the mass spectrometric data processing method. According to the method, rapidly scanned PPM-level and even higher trace sensitivity can be acquired by a high-precision quadrupole mass spectrometry tube.

Description

Technical field [0001] The invention relates to a method for rapidly analyzing trace impurities in trace gases by using a quadrupole mass spectrometer, and belongs to the field of analysis. Background technique [0002] The quadrupole mass spectrometer has been widely used in the field of gas composition analysis due to its strong resolution, high sensitivity, and fast response speed, such as the analysis of impurities in ultra-pure gases, the analysis of residual gas components in vacuum electronic devices, and the inspection of vacuum systems. Omission analysis, etc. The quadrupole mass spectrometer consists of a quadrupole mass spectrometer, a mass spectrometer power supply, a data acquisition system for micro-current amplification, and a computer control system. The quadrupole mass spectrometer includes an ion source, a quadrupole assembly and an electron multiplier. The ion source ionizes the gas components into ions. The qualified ions are obtained by the electron multipl...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the technical problem of the contradiction between the analysis speed and the trace sensitivity in the analysis process of the trace impurity gas composition in the trace impurity gas sample in the prior art, the present invention provides a rapid analysis method for the trace impurity in the trace gas by using a quadrupole mass spectrometer

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