A laser thickness gauge

Abstract

The invention belongs to the field of thickness gauges, and discloses a laser thickness gauge. The laser thickness gauge comprises a C-shaped frame and a laser, a photosensitive element, a beam splitter, a second upper reflector, a second lower reflector, a first upper reflector, a first lower reflector, an upper lens and a lower lens which are jointly installed on the C-shaped frame. The first upper reflector and the first lower reflector are symmetric about the horizontal symmetric plane. The second upper reflector and the second lower reflector are symmetric about the horizontal symmetric plane. The upper lens and the lower lens are symmetric about the horizontal symmetric plane and are convex lenses. The beam splitter is parallel to the horizontal symmetric plane. The laser thickness gauge effectively solves the problem that upper laser and lower laser are not synchronous, is more stable and precise in measurement and saves the manufacturing cost.

Description

technical field [0001] The invention belongs to the field of thickness gauges, and more specifically relates to a laser thickness gauge. Background technique [0002] In industrial production such as lithium battery pole piece coating and metal foil production line, the stability of strip thickness determines the quality of the final product, so a large number of on-line thickness measuring devices are required. For the thickness measurement of non-transparent films such as lithium battery coated pole pieces and metal foils, ray thickness measurement and laser thickness measurement are currently the most used. Although ray thickness measurement has high precision, it is not an ideal choice because of ray radiation, safety problems, expensive equipment, high failure rate, and environmental sensitivity. The high-frequency and high-resolution characteristics of the laser have great advantages in the field of online film thickness measurement, so it has been widely used. At pr...

AI Technical Summary

Problems solved by technology

During the measurement process, due to the influence of mechanical vibration, ambient temperature, etc., the C-shaped frame will be slightly deformed, making the distance between the upper and lower laser heads unstable, and will cause a large deviation for micron-level thickness measurement

Document No. CN103363911A describes a laser thickness gauge that uses laser as a light source, innovatively adopts a single area array CCD imaging, which can avoid the error caused by the unstable distance between the upper and lower laser heads, but if the two lasers are not completely synchronized It will cause different images on the CCD, making thickness calculation more difficult

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