Method for extending microscopic imaging field depths and microscopic imaging device
A microscopic imaging and depth-of-field technology, applied in the field of optical imaging, can solve problems such as defocusing, difficulty in applying different magnification microscope objectives, difficulty in focusing, etc., and achieve the effect of solving difficulty in focusing, satisfying surface defect detection, and simple structure
Inactive Publication Date: 2016-12-21
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
View PDF6 Cites 3 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] In order to solve the problems of focusing difficulties, defocusing and difficulty in applying to different magnification microscope objectives in the process of measuring surface defects of spherical and aspheric optical elements through microscopic imaging technology, the present invention proposes a microscopic imaging depth-of-field extension To solve the above-mentioned problems
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.
[0028] see figure 1 , is a flow chart of a method for extending the depth of field of microscopic imaging, the method is used for extending the depth of field of microscopic imaging in the detection of optical element defects, especially for microscopic imaging with different magnifications of microscopic objective lenses The depth of field extension, the method steps are as follows:
[0029] Step S101: adding a wavefront encoding plate to the microscopic imaging device. Wherein, adding the wavefront coding plate in the microscopic imaging device is adding the wavefront coding plate ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a method for extending the depth of field of microscopic imaging in the detection of optical element defects. The method includes: adding a wavefront encoding plate to the microscopic imaging device; Analyze the incident angle of light behind the wavefront encoding plate; improve, optimize and analyze the phase function of the wavefront encoding plate according to the requirements of depth of field extension and adapting to the imaging of different magnification microscope objectives; determine the optimization of the designed wavefront encoding plate and setting the wavefront coding plate according to the optimized design parameters, and extending the depth of field of the microscopic imaging device through the wavefront coding plate with the optimized design parameters. The invention also provides a micro imaging device. Through the method and the microscopic imaging device of the present invention, the depth of field of the microscopic imaging device can be extended significantly, and the microscopic imaging device is applicable to microscopic objective lenses with different magnifications, thereby meeting the demand for high-precision optical element defect detection.
Description
technical field [0001] The invention belongs to the field of optical imaging, and relates to a method and a microscopic imaging device for extending the depth of field of microscope imaging with different magnifications in optical component defect detection. Background technique [0002] With the trend of high-precision surface of optical components, when the surface of high-precision optical components has defects, etc., it will greatly affect the imaging quality, cause unnecessary scattering and diffraction, and cause energy loss. For large-aperture telescopes, national Ignition devices, lithography objectives, etc., in particular, cause a large energy loss. Therefore, it is necessary to detect surface defects of planar optical components during the final inspection process, digitally evaluate their defect characteristics, and then provide guidance data for high-precision optical processing. For high-precision lithography projection objectives and national ignition device...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/95G01N21/958
CPCG01N21/95G01N21/958G01N2021/9511G01N2021/9583
Inventor 武东城刘江苗二龙高松涛张敏隋永新杨怀江
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI