Sapphire crystal rod crystal axis detection and positioning device

Abstract

The invention discloses a sapphire crystal bar crystal axis detection and positioning device. The sapphire crystal bar crystal axis detection and positioning device consisting of a crystal axis detection device, a crystal axis positioning device and a movable base. A bracket is arranged above a working table of the device; the crystal axis detection device is arranged on the bracket; the movable base is arranged on the working table; the crystal axis positioning device is arranged on the movable base; the movable base consists of a longitudinal movement guide rail, a longitudinal movement platform, a longitudinal screw rod, a supporting platform and a rotating platform; the crystal axis positioning device consists of a round bracket, a longitudinal oscillation sleeve, a transverse oscillation cylinder, an arc-shaped clamping block and an adjusting screw; and the crystal axis detection device consists of a lifting platform, an infrared transmitter, an infrared receiver and a data display device. In a detection adjustment process, an operator directly rotates the adjusting screw and the rotating platform, and performs observation and adjustment from different directions to quickly correct a crystal axis side of a crystal bar, the adjustment and positioning operation quick, easy and accurate, the detection device is arranged on the lifting platform, an incident angle and a reflection angle of detection light rays are controlled reasonably, and the detection effect is relatively good.

Description

technical field [0001] The technology belongs to the technical field of sapphire wafer processing equipment, and in particular relates to a sapphire crystal rod crystal axis detection and positioning device. Background technique [0002] After the artificial sapphire crystal is crystallized to form a crystal rod, the axial direction of the geometric shape of the crystal rod will slightly deviate from the axial direction of the crystal forming the crystal rod. This deviation will cause the crystal axis direction of the subsequent processed wafer to be incorrect. When passing through the wafer, the misalignment of the crystal axis will lead to an increase in the amount of light scattered, resulting in a decrease in the quality of the wafer. For the just-formed crystal ingot, in order to support the subsequent processing procedures, first rough machining is performed, the side surface of the crystal ingot is ground into a cylindrical surface, and the two ends of the crystal ing...

AI Technical Summary

Problems solved by technology

[0007] The object of the present invention is to provide a sapphire ingot crystal axis detection and positioning device to solve the problems in the prior art that when the crystal axis direction of the crystal ingot is detected and positioned in the existing detection and positioning device, there are many adjustment points and difficulties in positioning and fixing , The problem of inaccurate crystal axis positioning

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