A vacuum temperature field measuring device and measuring method

Abstract

A multiple-point vacuum temperature measurement device and measurement method, including multiple temperature thermocouples, flange plate and flange press frame; the said flange plate matches the flange hole in the vacuum chamber of the vacuum equipment whose temperature is to be measured and there certain number of flange threaded hole on the flange plate corresponding to the number of the temperature thermocouple and therefore the the temperature thermocouple can be threaded into the threaded hole in the flange plate and the thermocouple wire end can be fixed on the temperature measurement point needed in the vacuum chamber; the flange plate in which the thermocouple has been installed will be installed on the chamber flange entrance by a flange press frame fastened by screws and O-type flange ring is installed between the flange plate and chamber wall; the power line of the thermocouple is connected to a paperless recorder. The invention can be applied in temperature field measurement of flanges with different dimensions and can install different number of thermocouples to conduct temperature measurement; it can reduce losses better because individual thermocouple, if damaged, can be replaced individually and it can satisfy the temperature measurement requirements of vacuum chambers with different spaces.

Description

technical field [0001] The invention belongs to the technical field of vacuum equipment, and in particular relates to a temperature field measurement device and a measurement method for vacuum heat treatment equipment. The device measures the temperature field of the equipment in a high vacuum environment, and helps to calibrate and balance the temperature field of the equipment. Background technique [0002] At this stage, vacuum equipment has been widely used in various production fields, ranging from light bulbs, watches, to the production of some parts of automobiles and airplanes, all of which are inseparable from vacuum equipment. As a kind of vacuum equipment, vacuum heat treatment equipment can help users obtain materials or products with the same composition but different properties. [0003] Familiarity with the temperature and uniformity of the temperature field of the equipment is a key link in the use of vacuum heat treatment equipment. This multi-point vacuum ...

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Problems solved by technology

[0004] 1. On smaller size flanges, the welding method is difficult to realize the production of multi-point temperature measuring devices;

[0005] 2. The disadvantage of welding or glue filling is that when one or more thermocouples fail, in order to measure the temperature of the required points, a complete set of flanges and thermocouples must be replaced, causing unnecessary losses, etc.

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