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A production process modeling system and method

A technology of production process flow and modeling method, which is applied in the direction of general control system, control/regulation system, program control, etc. It can solve the problems that the production process flow cannot meet the production demand, so as to facilitate the review and arrangement of process information and avoid danger , extended and flexible effects

Active Publication Date: 2019-01-11
SEMICON MFG INT (SHANGHAI) CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a production process flow modeling system and method for solving the problem that the production process flow in the prior art cannot meet the production requirements

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  • A production process modeling system and method
  • A production process modeling system and method
  • A production process modeling system and method

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Embodiment Construction

[0039] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0040] see Figure 2 to Figure 5 . It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arb...

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Abstract

The invention provides a production process modeling system and a production process modeling method. The system comprises a process control module for production process information, a process multipath setting module for building and setting conditions for enabling products to walk in different paths, a stock operation environment program setting module for realizing single-step process backup, a product transfer module for realizing whole process backup and a queue time setting module for setting queue time. Based on the stock operation environment program setting module, single-step process backup is realized; based on the product transfer module, whole process backup is realized; or based on the queue time setting module, queue time setting is carried out. All process information is configured and managed in a unified mode, and production control demands are met; dangers to the production caused due to no related information are avoided; time consumed by manual product control is saved; the expansion is flexible, and the deployment is convenient; and the data are systematic, and the process information can be checked and tidied quickly.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a production process flow modeling system and method. Background technique [0002] The production process flow (Flow) in the wafer processing plant (Fab) is configured and saved in the integrated development environment (Integrated Development Environment, IDE) of the commercial software. like figure 1 As shown, the existing commercial software sets the process as follows: the top layer is the product (Product); the lower layer of the product is the process (or the definition of the manufacturing process of the product); the lower layer of the process is the step (Step), It is the refinement and realization of the process; the bottom layer is the specific production rules (Rule) in each step. [0003] However, these commercial softwares have some drawbacks: First, although different paths can be drawn between steps in the existing commercial software, it is impossibl...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/418
CPCG05B19/41865G05B2219/32252
Inventor 杨志超
Owner SEMICON MFG INT (SHANGHAI) CORP