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Workpiece surface treatment equipment

A technology for processing equipment and workpiece surfaces, which is applied in metal processing equipment, grinding/polishing equipment, manufacturing tools, etc., can solve the problems of limited irradiation range of lighting devices and easy flow of polishing liquid, etc., so as to improve the efficiency of grinding and polishing, Improve efficiency and improve sanitation effect

Active Publication Date: 2018-09-11
DEMETER SUZHOU ELECTRONICS ENVIRONMENTAL MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Based on this, it is necessary to provide a workpiece surface treatment equipment for the technical problem that the polishing liquid is easy to flow out of the operating table and the range of illumination of the lighting device is limited during the processing.

Method used

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Embodiment Construction

[0016] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0017] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counte...

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Abstract

The invention relates to a workpiece surface treatment device. The workpiece surface treatment device comprises a rack, a first adjusting arm, a second adjusting arm, a drive mechanism, a polishing disc, a grinding table and a lighting device. The first adjusting arm is in pivot joint with the rack, and the second adjusting arm and the first adjusting arm are hinged; the drive mechanism comprises a drive motor and a telescopic part, the polishing disc is arranged at the tail end of the telescopic part and is connected with a rotor of the drive motor through a drive shaft penetrating the telescopic part, and the grinding table comprises a bearing disc and a liquid collection plate; the lighting device comprises a light guiding part and a lighting lamp; the lighting lamp is arranged at the tail end of the light guiding part, and the light direction of the lighting lamp faces the polishing disc; according to the workpiece surface treatment device, the technical problem that in the machining process of polishing liquid, the polishing liquid is likely to flow out of an operation table is solved, the grinding and polishing efficiency is improved, under the effect of the light guiding part, the lighting lamp can be moved to the area required to be irradiated, and the grinding and polishing efficiency of operation by a user when the work environment is low in brightness is improved.

Description

technical field [0001] The invention relates to the technical field of surface treatment, in particular to a workpiece surface treatment equipment. Background technique [0002] Workpiece surface treatment equipment is widely used in the wafer processing industry. It is mainly used for copper polishing and CMP polishing of wafers. It belongs to high-precision processing, and the accuracy of product size is required to be high. [0003] At present, the grinding and polishing liquid used by the grinding machine in the finishing process such as wafer grinding and polishing easily flows out of the operating table during the processing, which affects the sanitary environment around the grinding machine. In addition, when the brightness of the working environment is low, it is not conducive to the user's grinding and polishing operation. The traditional method is to install lighting devices, but the traditional lighting devices are fixed and the range of illumination is limited. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/00B24B37/34B24B41/02B24B55/06B24B57/02
CPCB24B37/00B24B37/34B24B41/02B24B55/06B24B57/02
Inventor 周利虎刘宇杰宋军
Owner DEMETER SUZHOU ELECTRONICS ENVIRONMENTAL MATERIALS CO LTD