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Grinding and polishing machine

A polishing machine and polishing disc technology, applied in the polishing field, can solve the problem that polishing liquid is easy to flow out of the operating table, and achieve the effect of improving efficiency and improving hygiene

Active Publication Date: 2018-12-11
DEMETER SUZHOU ELECTRONICS ENVIRONMENTAL MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Based on this, it is necessary to provide a grinding and polishing machine for the technical problem that the polishing liquid is easy to flow out of the operating table during the processing

Method used

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Embodiment Construction

[0016] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0017] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counte...

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PUM

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Abstract

The invention relates to a grinding polisher. The grinding polisher comprises a frame, a first adjusting arm, a second adjusting arm, a driving mechanism, a polishing disc and a grinding table, wherein the first adjusting arm is in pivot joint with the frame, and the second adjusting arm is hinged to the first adjusting arm; the driving mechanism comprises a driving motor and a stretchable piece; the polishing disc is arranged at the tail end of the stretchable piece and is connected to a rotor of the driving motor through a driving shaft which is arranged through the stretchable piece; and the grinding table comprises a carrying disc and a liquid collecting plate. The grinding polisher driven by the driving motor can be used for grinding and polishing a to-be-machined part placed on the carrying disc. As a plurality of liquid collecting grooves are distributed around the carrying disc, a polishing solution which is added in the grinding and polishing process can be collected in the plurality of liquid collecting grooves and then is uniformly treated after the machining operation, so that the technical problem that the polishing solution in the machining process is likely to flow out of an operating table is solved, the sanitation of the work environment is improved, and therefore, the grinding and polishing efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of polishing, in particular to a grinding and polishing machine. Background technique [0002] Grinding and polishing machines are widely used in the wafer processing industry. They are mainly used for copper polishing and CMP polishing of wafers. They belong to high-precision processing and require high precision in product size. [0003] At present, the grinding and polishing liquid used by the grinding machine in the finishing process such as wafer grinding and polishing easily flows out of the operating table during the processing, which affects the sanitary environment around the grinding machine. Contents of the invention [0004] Based on this, it is necessary to provide a grinding and polishing machine for the technical problem that the polishing liquid easily flows out of the operating table during the processing. [0005] A grinding and polishing machine comprises a frame, a first regulating arm...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/10B24B37/30B24B37/34B24B57/00
CPCB24B37/10B24B37/30B24B37/34B24B57/00
Inventor 周利虎刘宇杰宋军
Owner DEMETER SUZHOU ELECTRONICS ENVIRONMENTAL MATERIALS CO LTD