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A Method for Measuring the Depth of Groove Samples Using Optical Microscope

A technology of optical microscopy and groove depth, which is applied in the direction of adopting optical devices, measuring devices, instruments, etc., can solve the problems of low precision and achieve the effects of avoiding principle errors, improving measurement accuracy, and improving accuracy

Active Publication Date: 2019-03-08
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention solves the problem of low accuracy in existing methods for measuring the depth of groove samples

Method used

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  • A Method for Measuring the Depth of Groove Samples Using Optical Microscope
  • A Method for Measuring the Depth of Groove Samples Using Optical Microscope
  • A Method for Measuring the Depth of Groove Samples Using Optical Microscope

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Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0029] Specific implementation mode one: combine figure 1 and Figure 2(a) illustrate this embodiment,

[0030] A method for measuring the depth of a groove sample by means of an optical microscope, comprising the following steps:

[0031] Step 1. Obtain the profile data of the groove sample by optical microscopy;

[0032] Step 2. For the contour data of the groove sample, the maximum gradient method is used to determine the positions of the edges on both sides of the groove sample, and the width W of the groove is obtained;

[0033] Step 3. For the contour data of the upper surface of the groove, select a section of the upper surface avoidance distance D on each side edge of the groove d ;Delete the two upper surface avoidance distances D from the upper surface contour data on both sides of the groove d Corresponding data, use the remaining two sections of groove upper surface contour data as the upper surface effective data range; the upper surface avoidance distance D d ...

specific Embodiment approach 2

[0038] The upper surface avoidance distance D described in step 3 of this embodiment d in the range of

[0039] Other steps and parameters are the same as those in Embodiment 1.

specific Embodiment approach 3

[0040] The acquisition process of the estimated value H of the groove sample depth described in step 4 of this embodiment includes the following steps:

[0041] Read the depth value of the groove sample through the sample nominal value or the W / 3 method, and use it as the estimated depth value of the groove sample, denoted as H.

[0042] Other steps and parameters are the same as those in Embodiment 1 or Embodiment 2.

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Abstract

The invention relates to a method for measuring the depth of a groove sample by using an optical microscopic mode and belongs to the optical microscopic measurement field. The objective of the invention is to solve the problem of low accuracy of an existing groove sample depth measuring method. The method of the invention includes the following steps: the contour data of a groove sample are obtained through the optical microscopic mode, and the locations of two side edges of the groove sample and the width W of the groove of the groove sample are determined; an upper surface avoidance distance Dd and a lower surface avoidance distance Ds are deleted from the upper surface contour data and lower surface contour data of the groove sample; and fitting is carried out by using groove sample contour data which are corresponding to the ranges of the remaining effective data of the upper surface and lower surface of the groove sample, so that accurate groove depth can be obtained. The method of the present invention is applicable to the measurement field of optical microscopic instruments.

Description

technical field [0001] The invention relates to the field of optical microscopic measurement, in particular to a method for groove sample depth. Background technique [0002] When performing calibration and performance testing of optical microscopic measuring instruments, such as laser confocal scanning microscopes, etc., a series of grooved standard samples of different depths are usually measured to calibrate and calibrate the axial performance of the instrument. In the process of measuring the lower surface of the groove, the upper surface of the groove will block the illumination beam or signal light path, which will affect the measurement accuracy of the area near the edge of the lower surface of the groove; and in the process of measuring the upper surface of the groove, the Due to the lack of illumination spots in the area near the edge, the signal-to-noise ratio of the system will be reduced, thereby affecting the measurement accuracy of this part of the area. There...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/22
CPCG01B11/22G01B21/045
Inventor 刘俭李梦周李强谭久彬谷康
Owner HARBIN INST OF TECH