An inverted pushing electric cylinder device

Abstract

The invention relates to an inverted electric cylinder pushing device, is applied to a cavity opening structure auxiliary device of semiconductor film deposition equipment, improves the stability of trigger signals at the time of closing a cavity cover through adding a certain empty travels, and belongs to the technical field of semiconductor film deposition application and manufacturing. The inverted electric cylinder pushing device comprises an electric cylinder mounted on an electric cylinder rod; the electric cylinder rod is a hollow structure, and is provided with a push rod inside; the electric cylinder rod is fixed on an upper cover plate; the push rod penetrates through the upper cover plate, and can extend in the electric cylinder rod to realize contact with the cavity or empty travel with the cavity; and a limiting pressure block is mounted at the end part of the push rod, and is matched with a limiting switch mounted on the cavity for limiting the distance of the empty travel. The inverted electric cylinder pushing device adds the empty travel, so that the upper cover plate can be totally closed with the cavity to prevent incapability of reaching the vacuum degree requirement due to incomplete closing.

Description

technical field [0001] The invention relates to a cavity opening structure auxiliary device applied to semiconductor thin film deposition equipment, which is suitable for the cavity opening mode of an inverted push electric cylinder, and improves the stability of a trigger signal when the cavity cover is closed by adding a certain idle stroke. The invention belongs to the technical field of semiconductor thin film deposition application and manufacture. Background technique [0002] When the semiconductor thin film deposition equipment is performing the deposition reaction, it needs to be carried out under vacuum conditions, which requires the chamber to be completely sealed when the equipment is started. If the chamber cannot be completely closed, it may cause the chamber to fail to meet the process pressure requirements, or process gas leakage may cause dangerous consequences. The vertical lifting and opening method may cause problems such as the upper cover and the chamb...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide an inverted push electric cylinder device, which mainly solves the problem that the upper cover plate and the chamber cannot be completely closed due to the sensitivity of the limit switch in the existing cavity opening method, or the limit switch can not be closed after closing. Issues such as inability to fully trigger

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