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Supporting device and supporting method

A support device and support unit technology, which is applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve the problems of large-scale devices and complicated control, and achieve the effect of preventing large-scale and complicated control

Active Publication Date: 2021-12-14
LINTEC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, in the conventional supporting device described in Document 1, in addition to the moving unit for relatively moving the adherend supporting unit and the sheet supporting unit, other components for forming a closed space are required, which may lead to problems in the device. The enlargement and complexity of control

Method used

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  • Supporting device and supporting method
  • Supporting device and supporting method

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Embodiment Construction

[0012] Hereinafter, an embodiment of the present invention will be described based on the drawings.

[0013] In addition, the X-axis, Y-axis, and Z-axis in this embodiment are in a relationship of being perpendicular to each other, and the X-axis and the Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. In addition, in this embodiment, from the point parallel to the Y axis figure 1 When the situation observed in the middle and front direction is used as a reference to indicate the direction, "up" is the direction marked by the arrow of the Z axis, "down" is the opposite direction, "left" is the direction marked by the arrow of the X axis, and "right" is the direction marked by the arrow of the X axis. Its opposite direction, "front" is parallel to the Y axis figure 1 The forward direction in , and the "back" is the opposite direction.

[0014] exist figure 1 Among them, the sheet adhering device 10 has: a sheet su...

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PUM

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Abstract

The support device (10A) has: a sheet support unit (20), which supports the outer edge of the adhesive sheet (AS); an adherend support unit (30), which supports the adherend (WF); a moving unit (40), which makes the sheet support unit (20) and the adherend support unit (30) relatively movable in the direction of leaving and approaching; the closed space forming unit (50), which passes through the moving unit (40) The relative movement is movably provided, and by relatively moving the closed space forming unit together with the adherend (WF), the adhesive sheet (AS) is separated from the adherend (WF) to form a surrounding area. Confined space (SP) of adherend (WF).

Description

technical field [0001] The invention relates to a supporting device and a supporting method. Background technique [0002] In the past, the following support device is known, which can be installed to form a closed space surrounding the adherend, and the adherend and the adhesive sheet are supported by the adherend support unit and the sheet support unit (for example, refer to Document 1: Japanese Patent Laid-Open No. 2012-60047). [0003] However, in the conventional supporting device described in Document 1, in addition to the moving unit for relatively moving the adherend supporting unit and the sheet supporting unit, other components for forming a closed space are required, which may cause problems in the device. The enlargement and complexity of control. Contents of the invention [0004] An object of the present invention is to provide a support device and a support method capable of preventing enlargement of the device and complicating control. [0005] The suppo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/683
CPCH01L21/683H01L21/6836H01L21/6835H01L21/67715H01L21/68714H01L21/68785
Inventor 高野健
Owner LINTEC CORP