Cleaning equipment cleaning brush after cmp concentric locking structure and usage method

A post-cleaning and jointing structure technology, which is applied in the field of concentric clamping structure, can solve the problems of large concentricity deviation of the butt joints at both ends of the cleaning brush, poor cleaning effect of the card-swiping joint, and complex structure of the cleaning-swiping card joint, etc., to achieve a clamping layout Mode optimization, convenient concentric clamping and quick change, compact and concise structure

CN106583295BActive Publication Date: 2019-05-17BEIJING SEMICORE PRECISION MICROELECTRONICS EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2019-05-17

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Abstract

A concentric snap-in structure and usage method of the cleaning brush of CMP post-cleaning equipment. The structure includes a cleaning brush, an idler shaft structure positioned with a tapered hole and a rectangular groove to transmit force to the cleaning brush, and a square structure positioned with the cleaning brush with a tapered hole. The telescopic drive shaft structure uniformly transmits force, the left swing frame supports the idler shaft structure, and the right swing frame supports the telescopic drive shaft structure. The cleaning brush includes a brush shaft and a brush set on the brush shaft. The right end of the brush shaft has a centering cone shaft and a square shaft that are concentric with the telescopic drive shaft structure. The left end of the brush shaft has a centering cone shaft and a rectangular shaft that are concentric with the idler shaft structure. The center of the centering cone shaft is equipped with a brush shaft. Pure water inlet connected to the inner cavity of the shaft. The invention has a compact and concise structure, which optimizes the cleaning and swiping card connection layout, can effectively improve the concentricity of the card connection, the sealing performance of the pure water penetration interface end, and has convenient quick changeability.
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Description

technical field

[0001] The invention relates to a concentric clamping structure of a cleaning brush of cleaning equipment after CMP, and a method for using the concentric clamping structure. Background technique

[0002] CMP (chemical mechanical Polishing) post-cleaning equipment is equipment for surface precision cleaning after high-precision polishing on the surface of electronic device wafers. In the post-CMP cleaning process, scrubbing with a brush combined with a spray medium is an effective way to remove contaminants on the wafer surface.

[0003] At present, the overseas prototypes of post-cleaning equipment that can be seen are connected to the cleaning brush in the following way: the cleaning brush idler shaft unit and the cleaning brush drive shaft unit are superimposed as one. This clamping method results in a complex structure of the equipment and concentrated functions, especially when the two ends of the cleaning brush are docked with square positioning, resul...

Examples

Embodiment Construction

[0060] Examples see figure 1 , figure 2 As shown, the cleaning brush concentric clamping structure of this post-CMP cleaning equipment includes a cleaning brush 1, an idler shaft structure 2 that is positioned in a tapered hole with the cleaning brush 1 and transmits force in a rectangular groove, and is positioned in a tapered hole with the cleaning brush 1 and A telescopic drive shaft structure 3 with uniform force transmission in four directions, a left swing frame 4 supporting the idler shaft structure 2 and a right swing frame 5 supporting the telescopic drive shaft structure 3. The left swing frame 4 is sleeved on the cavity seat 2-3 of the idle shaft structure 2. The right swing frame 5 is sleeved on the motor seat 3-4 of the retractable drive shaft structure 3.

[0061] see Figure 3-5 As shown, the cleaning brush 1 includes a brush shaft 6 and a brush 7 sleeved on the brush shaft 6; the right end of the brush shaft 6 has a centering cone shaft 6.1 and a square sha...