Angle limiting hinge applied to semiconductor equipment
A technology of semiconductors and hinges, which is applied to hinges with pins, door/window accessories, hinges, etc. It can solve the problems of large switch cavity angles, compression of the transmission module, and heavy weight of the upper cover of the cavity, etc., to achieve Increased installation range, ease of use, and simple structure
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[0017] reference figure 1 , An angle limit hinge applied to semiconductor equipment, consisting of five parts: upper hinge 2, lower hinge 5, fixed pin 3, rotating shaft 4 and limit block 1.
[0018] The upper hinge 2 and the lower hinge 5 are connected by a rotating shaft, and the upper hinge 2 can rotate with the rotating shaft 4;
[0019] The upper hinge 2 and the lower hinge 5 are respectively provided with two pin holes.
[0020] The fixing pins 3 are detachable and are in different pin holes when the cavity is switched.
[0021] The fixed pin is located in the upper pin hole when the cavity is opened, so that the hinge can maintain a fixed angle.
[0022] A limit block 1 is provided above the lower hinge 5.
[0023] The upper hinge of the present invention is connected with the upper cover plate of the reaction chamber, the lower hinge is connected with the reaction chamber body, the two hinges are fixed by a rotating shaft, and the upper hinge can rotate along the rotating shaft; ...
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