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A guide tube, a film thickness sensor and evaporation equipment

A technology of film thickness and guide tube, which is applied in the field of guide tube, film thickness sensor and evaporation equipment, and can solve the problem of inaccurate film thickness

Active Publication Date: 2020-07-07
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the OLED evaporation process, when the film thickness sensor is used to detect the film thickness for a long time, the vapor deposition is easy to accumulate at the vapor deposition entrance of the guide tube 1 (referred to as the guide tube entrance), so that the crystal oscillator can sense the vapor deposition Reduced, resulting in inaccurate detection of film thickness

Method used

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  • A guide tube, a film thickness sensor and evaporation equipment
  • A guide tube, a film thickness sensor and evaporation equipment
  • A guide tube, a film thickness sensor and evaporation equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] see figure 2 , a guide tube provided in Embodiment 1 of the present application is used for a film thickness sensor, the guide tube is hollow, and includes: an evaporation inlet 11 and an evaporation outlet 12; wherein, the evaporation inlet 11 has a cross-sectional area larger than the evaporation The cross-sectional area of ​​the material outlet 12, from the evaporated material inlet 11 to the evaporated material outlet 12, the cross-sectional area of ​​the guide pipe gradually decreases.

[0035] Because the cross-sectional area of ​​the vapor deposition inlet 11 of the guide pipe is greater than the cross-sectional area of ​​the vapor deposition outlet 12 of the guide pipe, like this, when the film thickness sensor using the guide pipe detects the thickness of the film, it can reduce the The influence of the accumulation of vapor deposition on the vapor deposition that can be sensed by the crystal vibrator is reduced, thereby reducing the influence of the accumulat...

Embodiment 2

[0041] The guide tube provided in Embodiment 2 of the present application is similar to the guide tube provided in Embodiment 1 of the present application, and the same parts will not be repeated here, and only the different parts will be described below.

[0042] see image 3 , the guide pipe provided in Embodiment 2 of the present application is divided into two sections, from the vapor deposition inlet 11 to the vapor deposition outlet 12, the cross-sectional area of ​​a section of the guide pipe 101 near the vapor deposition inlet 11 is the same as the cross-sectional area of ​​the vapor deposition inlet 11 The area is the same, and the cross-sectional area of ​​the other guide pipe 102 gradually decreases; if the cross-section of the guide pipe is circular, it can be expressed as a section of guide pipe from the vapor deposition inlet 11 to the vapor deposition outlet 12, which is close to the vapor deposition inlet 11. The caliber of 101 is the same as the caliber of the...

Embodiment 3

[0044] The guide tube provided in the third embodiment of the present application is similar to the guide tube provided in the first embodiment of the present application, and the same parts will not be repeated here, and only the different parts will be described below.

[0045] see Figure 4 , the guide pipe provided in Embodiment 3 of the present application is divided into two sections, from the vapor deposition inlet 11 to the vapor deposition outlet 12, the cross-sectional area of ​​a section of the guide pipe 101 near the vapor deposition inlet 11 is gradually reduced to be equal to the vapor deposition The cross-sectional area of ​​the outlet 12 is the same, and the cross-sectional area of ​​the other guide pipe 102 is the same as the cross-sectional area of ​​the vapor deposition outlet 12; if the cross section of the guide pipe is circular, it can be expressed as: The caliber of a section of the guide pipe 101 near the vapor deposition inlet 11 is gradually reduced t...

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Abstract

The invention provides a guide tube, a film thickness sensor and an evaporation device, wherein the influence of evaporation matters accumulated at the inlet of the guide tube on the detection accuracy of the film thickness can be reduced. The guide tube provided in the invention is applied to the film thickness sensor. The guide tube is hollow and comprises an evaporation matter inlet and an evaporation matter outlet. The cross-sectional area of the evaporation matter inlet is larger than the cross-sectional area of the evaporation matter outlet.

Description

technical field [0001] The present application relates to the technical field of evaporation technology, in particular to a guide tube, a film thickness sensor and evaporation equipment. Background technique [0002] At present, the evaporation process is widely used in the manufacture of various products. Evaporation is the process of evaporating or sublimating the substance to be filmed in a vacuum, so that it is deposited on the surface of the workpiece or substrate to form a thin film. For example, in the process of manufacturing an organic electroluminescence display device (Organic Electroluminesence Display, OLED), it is necessary to vapor-deposit multiple layers of organic material thin films. In the process of evaporation, it is necessary to use a film thickness sensor to detect the thickness of the film in real time, so as to control the evaporation. Specifically, a crystal oscillator is installed in the film thickness sensor. Since the crystal oscillator has the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B21/08C23C14/54C23C14/24
CPCC23C14/24C23C14/546G01B21/085
Inventor 梁志凡
Owner BOE TECH GRP CO LTD
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