Control System of Power Adjustment Cabinet for Polysilicon Reduction Furnace

Abstract

The invention discloses a polysilicon reduction furnace power regulating cabinet control system, which includes an input terminal composed of a winding coil and a thyristor, an output terminal composed of a neutral wire and a live wire, and a main fast fuse electrically connected to one end of the winding coil. The output terminal includes a voltage sensor connected across the neutral wire and the live wire, one end of the winding coil is connected to the neutral wire, and the other end is respectively connected to the live wire after passing through the main fast fuse, capacitor, resistance and current sensor. and a resistor in series to form an electronic component. The control system also includes a thyristor connected in parallel at both ends of the electronic component and a control module electrically connected to the gate of the thyristor. The current sensor and the voltage sensor respectively feed signals to the control module .

Description

【Technical field】 [0001] The invention relates to the field of polysilicon production, in particular to a power control system for a power regulating cabinet of a polysilicon reduction furnace. 【Background technique】 [0002] As a semiconductor material, polysilicon is the main raw material of photovoltaic materials at present. Photovoltaic materials can directly convert solar energy into electrical energy, such as solar cells. One of the main methods of producing polysilicon at present is the improved Siemens method. The modified Siemens method produces rod-shaped polysilicon by vapor deposition. [0003] The Siemens method reduction production process known in the prior art is to mix vaporized trichlorosilane and carrier gas hydrogen in a certain proportion and introduce it into the polysilicon reduction furnace, and apply voltage to both ends of the rod-shaped silicon core placed in the reduction furnace. Under high temperature and pressure, on the surface of the high-t...

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Problems solved by technology

[0006] In the process of the above-mentioned process control, the mismatch between the flux and the current adjustment is easy to occur, resulting in the temperature change of the silicon rod, and the silicon rod will crack due to the temperature change during the growth process, resulting in an increase in resistance, which in turn causes a change in the current, and the current The magnetic field generated by the change makes the energized silicon rod generate torque under the action of magnetic force, which in turn causes the root of the silicon rod to loosen

On the other hand, the reduction of the current will cause the current of the control system of the power regulating cabinet to back down, and if the control system backs out too quickly, it will cause the current overload of the fast fuse to be damaged, causing a power outage

As a result of power failure, the reaction temperature on the surface of the silicon rod will be unstable, so that the stress cannot be released uniformly; thus causing unfavorable consequences such as loose structure of the silicon rod, local fracture, and furnace down.

[0007] During the production of polysilicon rods, the reduction furnace frequently cracks or breaks the furnace, which not only affects the output of a single furnace, but also causes high production costs.

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