Polysilicon reduction furnace power regulation cabinet control system

Abstract

The invention discloses a polysilicon reduction furnace power regulation cabinet control system, which comprises an input end formed by a winding coil and a thyristor, an output end formed by a zero wire and a fire wire, and a main rapid fuse electrically connected with one end of the winding coil, wherein the output end comprises a voltage sensor in cross connection between the zero wire and the fire wire; one end of the winding coil is connected with the zero wire, and the other end passes across the main rapid fuse, a capacitor, a resistor and a current sensor and is then connected with the fire wire; and the capacitor and the resistor are serially connected to form an electronic assembly. The control system also comprises a thyristor in parallel connection onto two ends of the electronic assembly and a control module electrically connected with the gate of the thyristor. The current sensor and the voltage sensor feed signals to the control module respectively.

Description

[0001] 【Technical field】 [0002] The invention relates to the field of polysilicon production, in particular to a power control system for a power regulating cabinet of a polysilicon reduction furnace. [0003] 【Background technique】 [0004] As a semiconductor material, polysilicon is the main raw material of photovoltaic materials at present. Photovoltaic materials can directly convert solar energy into electrical energy, such as solar cells. One of the main methods of producing polysilicon at present is the improved Siemens method. The modified Siemens method produces rod-shaped polysilicon by vapor deposition. [0005] The Siemens method reduction production process known in the prior art is to mix vaporized trichlorosilane and carrier gas hydrogen in a certain proportion and introduce it into the polysilicon reduction furnace, and apply voltage to both ends of the rod-shaped silicon core placed in the reduction furnace. Under high temperature and pressure, on the surfac...

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Problems solved by technology

[0008] In the above process control process, the mismatch between the flux and current regulation is prone to occur, resulting in temperature changes in silicon rods. During the growth process, silicon rods will crack due to temperature changes, resulting in increased resistance, which in turn causes current changes, and current The magnetic field generated by the change makes the energized silicon rod generate torque under the action of magnetic force, which in turn causes the root of the silicon rod to loosen

On the other hand, the reduction of the current will cause the current of the control system of the power regulating cabinet to back down, and if the control system backs out too quickly, it will cause the current overload of the fast fuse to be damaged, causing a power outage

As a result of power failure, the reaction temperature on the surface of the silicon rod will be unstable, so that the stress cannot be released uniformly; thus causing unfavorable consequences such as loose structure of the silicon rod, local fracture, and furnace down.

[0009] During the production of polysilicon rods, the reduction furnace frequently cracks or breaks the furnace, which not only affects the output of a single furnace, but also causes high production costs.

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