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High-flux combined material heat treatment system and heat treatment and detecting method thereof

A heat treatment system and a technology for combining materials, which are applied in the high-throughput combined material heat treatment system and its heat treatment and detection fields, can solve the problems of unstable quality of micro-area sample heating, and improve the accuracy of phase transition temperature, efficient heat treatment, and high-efficiency heat treatment. Stable quality effect

Active Publication Date: 2017-07-28
成都芯曌科技有限公司
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Problems solved by technology

[0006] In order to overcome the problem of unstable heating quality of micro-area samples by existing equipment, the present invention provides a high-throughput combined material heat treatment system and its heat treatment and detection methods

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  • High-flux combined material heat treatment system and heat treatment and detecting method thereof
  • High-flux combined material heat treatment system and heat treatment and detecting method thereof
  • High-flux combined material heat treatment system and heat treatment and detecting method thereof

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Embodiment Construction

[0033] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and implementation examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0034] see figure 1 , the first embodiment of the present invention provides a high-throughput combined material heat treatment system 1, the high-throughput combined material heat treatment system 1 is used to heat-treat the high-throughput combined material chip 10, and the high-throughput combined material chip 10 includes multiple domain samples of different compositional materials. The high-throughput combined material heat treatment system 1 includes a laser heating system 11 , a temperature control system 13 , a host computer 15 and a displacement control system 17 . The h...

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Abstract

The invention relates to a high-flux combined material heat treatment system which is used for performing heat treatment on a high-flux combined material chip. The system comprises a power-adjustable laser heating system and a temperature control system. The temperature control system detects temperature of a micro-area sample and performs operational analysis for acquiring a data signal. The laser heating system adjusts heating power according to the data signal so that consistent temperature increase amplitude of each micro-area sample at each time is realized. When phase change of the micro-area sample occurs, the temperature control system records phase change temperature and simultaneously makes the laser heating system stop heating to the micro-area sample. The invention further relates to a heat treatment and detecting method which utilizes the high-flux combined material heat treatment system. The high-flux combined material heat treatment system can perform stable and accurate heat treatment on the micro-area sample, thereby ensuring stable quality of the micro-area sample in heating at each time.

Description

[0001] 【Technical field】 [0002] The invention relates to the field of material heat treatment, in particular to a high-throughput composite material heat treatment system and a heat treatment and detection method thereof. [0003] 【Background technique】 [0004] The material phase diagram is a correlation diagram of material structure-composition-thermal conditions. By drawing the material phase diagram, the phase formation, thermal performance and mechanical properties of each component at different temperatures can be studied. In the drawing of the material phase diagram of the high-throughput combined material chip, when the existing heat treatment equipment heats the micro-region sample, the temperature rise of the micro-region sample is controlled by adjusting the pulse width. Therefore, the quality of the micro-area samples heated each time is different, so the phase transition temperature of the micro-area samples obtained by detection is inaccurate, so that the phase ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67G01K13/00G01N25/02
CPCH01L21/67115G01K13/00G01N25/02
Inventor 王维向勇苏阳闫宗楷
Owner 成都芯曌科技有限公司
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