High-throughput combined material heat treatment system and its heat treatment and detection method

A technology of heat treatment system and combined materials, which is applied in the high-throughput combined material heat treatment system and its heat treatment and detection fields, can solve the problem of unstable quality of micro-area sample heating, and achieve improved phase transition temperature accuracy, stable quality, The effect of efficient heat treatment

Active Publication Date: 2020-01-03
成都芯曌科技有限公司
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Problems solved by technology

[0003] In order to overcome the problem of unstable heating quality of micro-area samples by existing equipment, the present invention provides a high-throughput combined material heat treatment system and its heat treatment and detection methods

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  • High-throughput combined material heat treatment system and its heat treatment and detection method
  • High-throughput combined material heat treatment system and its heat treatment and detection method
  • High-throughput combined material heat treatment system and its heat treatment and detection method

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Embodiment Construction

[0028] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and implementation examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0029] see figure 1 , the first embodiment of the present invention provides a high-throughput combined material heat treatment system 1, the high-throughput combined material heat treatment system 1 is used to heat-treat the high-throughput combined material chip 10, and the high-throughput combined material chip 10 includes multiple domain samples of different compositional materials. The high-throughput combined material heat treatment system 1 includes a laser heating system 11 , a temperature control system 13 , a host computer 15 and a displacement control system 17 . The h...

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Abstract

The invention relates to a high-throughput combined material heat treatment system for heat-treating high-throughput combined material chips. The system includes a laser heating system with adjustable power and a temperature control system, and the temperature control system detects the temperature of micro-area samples. And carry out calculation and analysis to obtain data signals, the laser heating system adjusts the heating power according to the data signals, so that the temperature rise range of each micro-area sample remains consistent; when the micro-area sample undergoes a biophase change, the temperature control The system records the temperature of the phase change and simultaneously controls the laser heating system to stop heating the micro-region sample. The present invention also relates to a heat treatment and detection method using the high-throughput combined material heat treatment system. The high-throughput combined material heat treatment system can perform stable and precise heat treatment on micro-area samples, ensuring stable quality of micro-area samples heated each time.

Description

【Technical field】 [0001] The invention relates to the field of material heat treatment, in particular to a high-throughput composite material heat treatment system and a heat treatment and detection method thereof. 【Background technique】 [0002] The material phase diagram is a correlation diagram of material structure-composition-thermal conditions. By drawing the material phase diagram, the phase formation, thermal performance and mechanical properties of each component at different temperatures can be studied. In the drawing of the material phase diagram of the high-throughput combined material chip, when the existing heat treatment equipment heats the micro-region sample, the temperature rise of the micro-region sample is controlled by adjusting the pulse width. Therefore, the quality of the micro-area samples heated each time is different, so the phase transition temperature of the micro-area samples obtained by detection is inaccurate, so that the phase diagram of the ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67G01K13/00G01N25/02
CPCH01L21/67115G01K13/00G01N25/02
Inventor 王维向勇苏阳闫宗楷
Owner 成都芯曌科技有限公司
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