Apparatus and method for planarizing multiple shadow masks on a common carrier frame
A shadow mask, planarization technology, applied in the direction of electro-solid devices, gaseous chemical plating, optical devices, etc., can solve the problems of continuous error, non-parallel or not substantially parallel, difficult to maintain dimensional stability, etc.
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[0048] Various non-limiting examples will now be described with reference to the drawings, wherein like reference numerals correspond to identical or functionally equivalent elements.
[0049] Various exemplary multi-mask alignment systems described herein enable construction of an effectively larger area shadow mask from multiple smaller area shadow masks. By constructing an effectively larger-area shadow mask from a smaller-area shadow mask, the smaller shadow mask can be kept over a larger area, for example larger than each individual smaller shadow mask Greater geometric accuracy of holes and orifices in . Since each small shadow mask is independent of other small shadow masks, the holes and apertures of each small shadow mask can also be appropriately sized without affecting the size of other small shadow masks.
[0050] Various exemplary multi-mask alignment systems described herein are capable of aligning multiple small area shadow masks (one at a time, or two at a tim...
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