Tri-axial capacitive type accelerometer and electronic device
An accelerometer, capacitive technology, applied in the measurement of acceleration, velocity/acceleration/impact measurement, measurement devices, etc., can solve the problems of the unfavorable triaxial capacitive accelerometer trend of thinning, large occupied area and weight of the mass block, etc. Achieve the effect of favoring the trend of thinning, reducing the zero point deviation and sensitivity deviation, and reducing the number of
Active Publication Date: 2017-08-11
SENODIA TECH (SHANGHAI) CO LTD
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However, the existing three-axis capacitive accelerometers are generally provided with different mass blocks for the capacitive detection areas in different axial directions, and the mass blocks occupy a large area and weight, which is not conducive to the thinness of the three-axis capacitive accelerometer. trend
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[0042]The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0043] As mentioned in the background art, capacitive accelerometers have become the most popular type of accelerometers because of their simple structure, low cost, and advantages such as high sensitivity and linearity in the low frequency range. However, the existing three-axis capacitive accelerometers generally have different mass blocks for the capacitive detection areas of different axes, and the mass blocks occupy a large area and weight, which is not con...
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The invention discloses a tri-axial capacitive type accelerometer and an electronic device. The tri-axial capacitive type accelerometer comprises a first mass block, a second mass block, and a plurality of detection areas arranged in any mass block range. The first mass block and the second mass block are arranged in a structural symmetric mode and are coupled and connected by an elastic structure; each mass block is arranged on a substrate movably by at least one corresponding fixed anchor point; and thus when an acceleration speed is applied to the tri-axial capacitive type accelerometer, motion corresponding to the acceleration speed is generated. Each of the plurality of detection areas includes a detection capacitor formed by a fixed structure and a movable structure; the mass blocks reuse the movable structures; and the fixed structures are fixed at the substrate and are used for generating specific capacitance change of an acceleration speed when the acceleration speed is applied to the tri-axial capacitive type accelerometer. According to the invention, on the basis of the lightening and thinning trend of the tri-axial capacitive type accelerometer, the zero-point offset and a sensitivity offset of the accelerometer can be reduced effectively.
Description
technical field [0001] The invention relates to the technical field of a three-axis capacitive accelerometer, and more specifically, relates to a three-axis capacitive accelerometer and an electronic device. Background technique [0002] Micro-accelerometers based on micro-electro-mechanical systems (MEMS, Micro-Electro-Mechanical-System) have been widely used in industry, medical, civilian, military, etc. due to their small size, low cost, good integration, and excellent performance. fields have been increasingly applied. At present, in the application of various mobile terminals, cameras, game controllers, navigators and other products, to a certain extent, it has become a standard configuration. In the development process, capacitive, resistive, and piezoelectric methods are the main application mechanisms for detecting acceleration. Among them, capacitive accelerometers are simple in structure, low in cost, and have high sensitivity in the low frequency range. And line...
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CPCG01P15/125
Inventor 邹波王辉刘爽
Owner SENODIA TECH (SHANGHAI) CO LTD